Models 947, 948 and 960 Leak Detectors Operations and Service Manual
5-4
Call Varian Vacuum Technologies Customer Service for any other problems.
NOTE
Varian Vacuum Technologies will not accept any part for return
without both a properly completed Return Materials
Authorization (RMA) and a Health and Safety Data Sheet.
Contact Customer Service at 1-800-8VARIAN to obtain an RMA
and a Health and Safety Data Sheet.
Pumps is gurgling
Pump oil is low.
Add oil.
KF clamps are loose.
Tighten the clamps.
Forepump manifold or vacuum
lines are leaking.
Check for leaks.
Pump drain plugs are loose.
Tighten the drain plugs.
Turbo pump not running
No power.
Check the outlets, power switch, and circuit
breakers.
Leaks.
Tighten KF clamps.
Check the Forepump manifold or vacuum lines
for leaking.
Verify that the system pressure bar graph is
at minimum.
Verify that the thermocouple gauges TC1 and
TC2 are in place and secure.
Verify that the hand operated valve is closed.
For normal operation, it must be closed.
Check all valves, vacuum lines, connectors
and vacuum seals for proper operation. Any
leak or break in vacuum integrity can cause
abnormal operation.
Table 5-2
Troubleshooting (Continued)
Symptom
Check For
Corrective Action
Summary of Contents for 948
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