82
Reference
Mass Flow Ranges Available:
10, 50, 200, 500, (15 psig max)
5000, 20000 sccm (60 psig max).
Custom ranges also available
Maximum Mass Flow Display Resolution:
0.01 sccm (range dependant)
Mass Flow Sensor Repeatability:
0.5% of Full Scale
Mass Flow Units of Measure:
sccs, sccm, scch, smls, smlm, smlh, sls, slm, slh
(user selectable)
Base Unit Dimensions:
8.9” W x 15.0” D x 10.8”H”
(216 mm W x 381 mm D x 267 mm H)
With Expansion Chassis:
8.9” W x 16.2” D x 14.8”H”
(216 mm W x 411 mm D x 376 mm H)
Power Supply:
100-240VAC 50/60Hz (Auto Sensing & Switching)
