Ulvac VD151 Instruction Manual Download Page 68

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株式会社アルバック

http://www.ulvac.co.jp/

サービス拠点一覧

http://www.ulvac.co.jp/support̲info/service/

販売拠点一覧

http://www.ulvac.co.jp/support̲info/sales̲oﬃce/

ULVAC ,Inc.

http://www.ulvac.co.jp/en/

Service Centers

http://www.ulvac.co.jp/en/support/service-center/

Sales Oﬃces

http://www.ulvac.co.jp/en/support/sales-oﬃces/

株式会社アルバック　

規格品事業部

〒253-8543

神奈川県茅ケ崎市萩園２５００

TEL:0467-89-2261

アルバック販売株式会社

本社（東京）

〒108-0075

東京都港区港南２-３-１３

TEL:03-5769-5511

アルバック販売株式会社

大阪支店

〒532-0003

大阪府大阪市淀川区宮原３-３-３１

TEL:06-6397-2286

ULVAC, Inc.

Components Division

2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan

TEL: +81-467-89-2261

rev5.1

ulvac . co . jp

ulvac . co . jp / en

Summary of Contents for VD151

Page 1: ...2 08 INSTRUCTION MANUAL OIL SEALED ROTARY VACUUM PUMP Before using this product be sure to read this operation manual Keep this manual with care to use at any time ULVAC Inc Components Division http w...

Page 2: ...e ensured if any of the devices put together did not conform to same regulations or the product itself was modified ULVAC shall be not liable to guarantee performance and safety in such cases above An...

Page 3: ...makes a mistake in handling it indicates a possibility that the user is subject to death or heavy injury CAUTION If the user makes a mistake in handling it indicates a possibility that the user is su...

Page 4: ...active gas is not allowed as there is a risk of leakage of the gas from the Pump unit if it was exhausted by the vacuum pump DANGER Use of the toxic combustible or combustion susceptible gas and subst...

Page 5: ...r at the top right of the Instruction Manual cover and issue the revised version WARNING This Instruction Manual shall absolutely need to be delivered to the last user that uses the product WARNING To...

Page 6: ...erating the unloading machinery 3 There is a risk that the Pump might drop or lay down when attempted unreasonable operation or machinery setup was not sufficient You are strictly restricted to enter...

Page 7: ...sure that any of hazardous energy is blocked before starting the operation 2 Entitled staff should conduct the wiring operation Erroneous wiring work might cause a fire 3 Conduct the wiring operation...

Page 8: ...us atmosphere by explosive gas It might cause injury and or fire WARNING 1 Be sure to turn OFF the Power Supply to execute check and repair You have a risk of getting electrical shock or injury by acc...

Page 9: ...ou have a risk of getting burned or fire caused by over heat Power Supply wiring Dismantling WARNING Be sure to cut off the electricity before starting install or dismantling operation Inlet piping Di...

Page 10: ...ture Ensured pressure value of the Pump shall be 0 03MPaG 0 3kg cm2G Gauge pressure Do not run the Pump on blocking the Exhaust outlet or putting any device that might hamper gas passage onto the outl...

Page 11: ...YK08 0028 DI 002 08 x 6 INLET 7 OUTLET...

Page 12: ...YK08 0028 DI 002 08 xi Fig 1 Warning Label VD151 VD201...

Page 13: ...ter beneath the Pump 4 Since you may get injury due to an anchor being used in the box guide the worker to wear the leather gloves and to use the appropriate tool Upon delivery of the product check fi...

Page 14: ...on 2 Ambient temperature and humidity for operation 4 C to 40 C less than 80 RH no condensation However ULVOIL R 42 shall be used for 4 10 C operation and ULVOIL R 72 shall be used for 10 40 C operati...

Page 15: ...pped with the protective device Put an overload protective device to connect through the motor with the Power Supply It is imperative to put the overload protective device under direction of the Elect...

Page 16: ...and Safety Measures 1 1 1 1 Danger Leakage of dangerous gas and dangerous materials 1 1 1 2 Warning Transfer of heavy material 1 1 1 3 Warning Electric shock 2 1 1 4 Warning Explosion 2 1 1 5 Caution...

Page 17: ...oise and Abnormal Vibration 33 6 2 7 Checking The Coupling and Spider 33 6 2 8 Checking The Oil Mist Trap 34 6 2 9 Checking the drain valve 35 6 3 Checkup after storage for a long period 35 6 4 Overha...

Page 18: ...Main displacement parts list VD201 46 Fig 1 Warning Label xi Fig 2 VD151 Dimensional drawing 6 Fig 3 VD201 Dimensional drawing 7 Fig 4 Lubrication and oil level indication 9 Fig 5 Connection to vacuu...

Page 19: ...ial or sucked substance at the occasion of check or disposal 1 When you check the pump please wear a brace that supports the toxic substances that exhaust the pump 2 To overhaul or dispose ask the spe...

Page 20: ...d pressure value of the Pump is 0 03MPaG 0 3kg cm2 G Gauge pressure Check the Exhaust side pressure of the pump If it was over 0 03 MPaG 0 3 kg cm2 G Gauge pressure take away anything in and around th...

Page 21: ...in need Read it with attention to acknowledge the toxic characteristics described on the MSDS Please do not use the chemical material except the above mentioned chemical material vacuum pump oil CAUT...

Page 22: ...stopped for a long time without venting the intake side to atmospheric pressure the pump oil will flow back to the cylinder making restart difficult This pump is equipped with the oil anti sucking fe...

Page 23: ...is the value indicated on the Pirani gauge when the standard oil ULVOIL R 72 is used The ultimate pressure when the McLeod gauge is used is approx one digit lower than the value indicated on the Pira...

Page 24: ...YK08 0028 DI 002 08 6 Fig 2 VD151 Dimensional drawing...

Page 25: ...YK08 0028 DI 002 08 7 Fig 3 VD201 Dimensional drawing...

Page 26: ...he machine horizontal to a place where there are less dust and humidity Make a layout taking into consideration of works such as setting removal check cleaning and so on As for the environmental condi...

Page 27: ...ation Should the oil touched to your hand are entered in your eye immediately follow the emergency treatment described on the MSDS CAUTION Ensure to use the vacuum pump oil designated by ULVAC Operati...

Page 28: ...pump is not transmitted to the vacuum chamber 3 Provide a vacuum valve vacuum gauge and vent valve between the vacuum chamber and pump as shown in Fig 5 Fig 5 Connection to vacuum chamber example WAR...

Page 29: ...p to cause break or oil leak of the casing or Oil level gauge resulting in overload of the motor WARNING 1 Be sure to use products made of electricity conducting material for the Duct piping Should yo...

Page 30: ...fety circuit such as Electromagnetic breaker for the electrical connection WARNING Install and operate the product in compliance with the laws and regulations relating to the safety e g Fire Defense L...

Page 31: ...0V 50Hz 1 90 400V 50Hz 2 00 415V 50Hz 2 00 415V 50Hz 1 50 380V 60Hz 1 50 380V 60Hz 1 60 400V 60Hz 1 60 400V 60Hz 1 60 440V 60Hz 1 60 440V 60Hz 1 70 460V 60Hz 1 70 460V 60Hz 3 60 200V 50Hz 3 60 200V 50...

Page 32: ...YK08 0028 DI 002 08 14 Fig 6 Terminal box internal wiring diagram Fig 7 Electrical wiring diagram...

Page 33: ...the terminal box with 380V 460V and 200V 240V power supply voltage please change the wiring WARNING 1 Be sure to put an overload protective device conforming to the motor capacity You have a risk that...

Page 34: ...sensor PTO N R T Nominal running temperature of the PTO WARNING 1 Be sure to use different power cords for the motor and for taking out a temperature sensor signal 2 Apply a voltage of 250 V or less...

Page 35: ...that it is open CAUTION 1 The Pump oil might deteriorate in a shorter time depending on the use It is recommended to replace the first Pump oil within ten days after operation start and see how it got...

Page 36: ...hour or more under high pressure 1000Pa or more would increase the oil volume that are discharged as the oil mist and cause rapid parts wear or cause a trouble such as burning You are recommended to...

Page 37: ...After checking 1 2 and 3 above close the vent valve and run the pump Here ensure that the vacuum gauge between the vacuum valve and the pump indicates a pressure close to the ultimate pressure WARNING...

Page 38: ...ight enter inside the Pump cylinder if you left the Pump stopped longtime three days or more even you kept the atmospheric pressure inside the Pump when stopped it last time The Overload protective de...

Page 39: ...r non load operation 20 temperature increase under high load operation 78 Refrain from touching the Motor and Pump unit until the Pump cools down after having stopped operation CAUTION 1 Ensure to clo...

Page 40: ...ow temperature shall be lower than the specified process performance Note further that keeping the Gas ballast valve open when not breathing in the condensed gas shall cause the Pump oil splashing and...

Page 41: ...is the overload phenomenon caused by increased viscosity of the pump oil To make sure you should confirm that the capacity of the motor overload protective device conforms to the motor rated value the...

Page 42: ...pump instead of the original exhaust pipe at the outlet 1 At the outlet of the pump remove the original exhaust pipe 2 You assemble the adapter and TMX 1 to establish the pump 3 Between the adapter a...

Page 43: ...raised oil mist trap please exchange We recommend you to install a Pressure monitor To use the Oil mist trap be cautious not to have clog of the filter in the trap Too much clog would prevent the exh...

Page 44: ...n the site shall likely to raise the ultimate value higher than the catalogue value as the vacuum gauge was put far away from the Pump or maybe affected by the water drop rust or other substances atta...

Page 45: ...mping speed MODEL VD151 VD201 0 5 10 15 20 25 0 1 1 10 100 1000 10000 100000 Pumping Speed m 3 hour Pressure Pa Gas ballast closed Gas ballast opened Pumping Speed JIS B 8316 1985 Type VD151 VD201 Pow...

Page 46: ...hile the suction pressure was between 3 104 4 104 Pa Operation opening the Gas ballast valve would require larger motive energy at all the time as its compression work is large even the suction pressu...

Page 47: ...nts depending on the use of the Pump you should check the following regularly it is helpful to avoid trouble and extend the pump life cycle WARNING 1 Be sure to turn OFF the Power Supply to execute ch...

Page 48: ...iction parts of the pump In the worst case the pump will seize up and cannot be rotated Table 4 gives a guide for pump oil change frequency CAUTION VD201 The oil level gauge is for checking the pump o...

Page 49: ...4 You should also replace the oil if breathed in the solution to deteriorate lubrication of the oil as it would also cause biting inside You shall have a risk if breathed in the solution in operation...

Page 50: ...armitupandthenchecktheultimatepressure 5 If the specified ultimate pressure cannot be attained by oil change sludge or other deposit may have collected on the bottom of the pump case In that event ove...

Page 51: ...p 1 Check whether bolts and nuts and the like fixing the pump are loose or not 2 Check whether pipes connected to the inlet outlet are loose or not 3 Check and ensure that there is no leakage from the...

Page 52: ...ing out the Motor Fig 11 Replacement of coupling spider 6 2 8 Checking The Oil Mist Trap To use the Oil mist trap be cautious not to have clog of the filter in the trap Too much clog would prevent the...

Page 53: ...gardless of the check items described above Overhaul shall be required to keep the performance as well as the safety and further to continue the production on forecast Please contact the Service Cente...

Page 54: ...d the reactive gas 6 The pump is not connected to the power supply 7 The power switch is not turned on 8 Problem with power supply voltage 9 The overload protector has actuated 1 Check the connection...

Page 55: ...is low 15 At the pump stop Not to vent the pump to atmospheric pressure 10 Replace the motor 11 Overhaul replace the cylinder and rotor 12 Overhaul replace the vanes 13 Overhaul replace the damaged c...

Page 56: ...ign matter has entered the pump 9 Components inside the pump have burnt out 1 Do the connection again to correct the rotation direction 2 Check the Cooling fan mount and clear the error 3 There is no...

Page 57: ...is clogged b Oil distributor valve has a trouble 11 Water entered inside the pump 1 Select another Pump type 2 Measure correctly the pressure 3 Use the Vacuum gauge that matches the measurement pressu...

Page 58: ...e would rise up around 100 on continuous operation under high suction pressure No problem 2 Control the oil level Supply the oil by the specified volume 3 Install a cooling device such as the Gas cool...

Page 59: ...d Oil seal Replace them if necessary 2 Tighten again the Oil inlet 6 2 3 6 4 Abnormal Motor current value 1 Foreign substance entered inside the Pump impaired the Motor rotation 2 Abnormal sliding of...

Page 60: ...ny toxic gas Note that you are requested to bear the cost and charges relating to the disposal WARNING 1 You should ask a special disposal agency for the disposal particularly if the Pump has exhauste...

Page 61: ...standard specifications although the product is used under the service conditions described in this document such as temperature range and power etc 2 Direct export transaction Product which has damag...

Page 62: ...cy or secondary damnification occurred to Buyer from law suit to ULVAC by third party for patent infringement 8 The reason of the failure deeemed below the specified usage condition by ULVAC technical...

Page 63: ...Cylinder 16 O ring S 5 NBR 1 17 O ring S 16 NBR 1 18 O ring S 70 NBR 2 19 Outlet valve 13 9 5 9 FPM 3 20 Outlet valve spring 10 20 SUS 3 2nd 21 Oil seal SC17 30 7 NBR 1 intermediate cover 22 O ring S...

Page 64: ...spring 2 6 31 SWP A 5 1st Cylinder 16 O ring S 5 NBR 1 17 O ring S 16 NBR 1 18 O ring S 85 NBR 1 19 Outlet valve 13 9 5 9 FPM 3 20 1st Outlet valve spring 10 20 SUS 3 2nd intermediate 21 Oil seal SC...

Page 65: ......

Page 66: ...ty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body indicating that content of the hazard...

Page 67: ...ion Remarks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful subs...

Page 68: ...o jp en Service Centers http www ulvac co jp en support service center Sales O ces http www ulvac co jp en support sales o ces 253 8543 TEL 0467 89 2261 108 0075 TEL 03 5769 5511 532 0003 TEL 06 6397...

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