YK08-0028-DI-002-08
Contents-2
5.3 Required Motive Energy ............................................................................................................. 28
6. Maintenance and Check ...................................................................................................................... 29
6.1 Maintenance ............................................................................................................................... 29
6.2 Regular Check ............................................................................................................................ 29
6.2.1 Pump Oil Level Check ................................................................................................................. 30
6.2.2 Vacuum Pump Oil Check ............................................................................................................. 30
6.2.3 Oil Leak Check ............................................................................................................................ 33
6.2.4 Checking The Gas Ballast Function ............................................................................................ 33
6.2.5 Checking The Metal Mesh at The Suction Inlet .......................................................................... 33
6.2.6 Checking The Noise and Abnormal Vibration ............................................................................. 33
6.2.7 Checking The Coupling and Spider ............................................................................................. 33
6.2.8 Checking The Oil Mist Trap ......................................................................................................... 34
6.2.9 Checking the drain valve ............................................................................................................. 35
6.3 Checkup after storage for a long period ..................................................................................... 35
6.4 Overhaul...................................................................................................................................... 35
6.5 Trouble check list ........................................................................................................................ 36
7. Disposal ................................................................................................................................................ 42
8. Product Warranty .................................................................................................................................. 43
8.1 Warrantable Items ....................................................................................................................... 43
8.2 Duration of guarantee ................................................................................................................. 43
8.3 Warrantee scope ......................................................................................................................... 43
8.4 Response procedure .................................................................................................................. 43
8.5 Disclaimer ................................................................................................................................... 44
8.6 Others ......................................................................................................................................... 44
9. Main Displacement Parts ..................................................................................................................... 45
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
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