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6.2.3 Oil Leak Check
The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit.
Type of the seals and O-rings are listed at the end of this document. Please contact the Service
Center close to you for purchase and repair.
6.2.4 Checking The Gas Ballast Function
When used the Gas ballast function, the valve or in the introduction passage inside the Pump
may be stuck in the dust. Replacement parts and repair support at the local service center.
Please contact us.
6.2.5 Checking The Metal Mesh at The Suction Inlet
The Suction inlet might be clogged by the dust contained in the gas breathed in from the
Vacuum chamber and thus the Pump performance might be impaired.
If there is the metal mesh is dirty, please wash that.
Further it is anticipated that any welding scale drops off in the pipe particularly at the beginning
of the system start. Be fully cautious.
6.2.6 Checking The Noise and Abnormal Vibration
Checking around the pump
1) Check whether bolts and nuts and the like fixing the pump are loose or not.
2) Check whether pipes connected to the inlet/outlet are loose or not.
3) Check and ensure that there is no leakage from the piping and valves.
Checking the pump
Please refer to the “6.5 Trouble check list.”
Should the condition was not recovered after having checked points indicated there, please
contact the closest Service center.
6.2.7 Checking The Coupling and Spider
The spider of the coupling that connects the pump body and the motor is made of rubber.
Replace it if the spider is damaged. Please contact the closest Service center.
Replace it once a year by rule of thumb. If the pump is started and stopped several hundreds of
times a day, however, shorten the replacement frequency.
1)
Stop the pump and turn OFF the Power Supply. Disconnect the power cable of the motor.
2)
To take out the spider, remove which fix the motor to the pump main unit, and remove the
motor. Then the coupling can be removed and the spider taken out.
3)
After inspecting the spider, mount the spider to either of the two coupling, and adjust the
position so that both claws of the couplings are engaged with each other as shown in Fig.
11.
