YK08-0028-DI-002-08
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CAUTION
1) Weal protective gears such as rubber gloves, protective goggle and
so on.
2) Read “1. 2 Chemical Material Safety Data Sheet” previously before
starting lubrication.
Should the oil touched to your hand are entered in your eye,
immediately follow the emergency treatment described on the MSDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC. Operation
using oil other than designated shall be out of our scope of guarantee
as it might impair the pump performance and shorten the life cycle.
Fig. 4 Lubrication and oil level indication
