YK08-0028-DI-002-08
39
Trouble
Causes
Processing method
Reference
Pressure does
not come down.
1) Pump exhaust capacity
is
smaller compared to
the Vacuum chamber
capacity.
2) Pressure measurement
method is wrong.
3) Vacuum gauge is not
appropriate.
4) Pipe connected to
the Suction inlet is thin
or
connection distance is
long.
5) Metal mesh at the Suction
inlet is clogged.
6) Oil is not supplied to
the specified volume.
7) The oil is deteriorated.
8) There is a leak in the
pipe connecting with the
Pump.
9) Not using the ULVAC
genuine oil.
10)
The
oil
is
not
circulating.
a) Oil pit of the Cover or
the like is clogged.
b) Oil distributor valve
has
a trouble.
11)Water entered inside
the pump.
1) Select another Pump type.
2) Measure correctly
the pressure.
3) Use the Vacuum gauge that
matches the measurement
pressure range and correctly
calibrated one to measure
the pressure.
4) Connect a pipe wider than inlet
diameter and shorten
the
connection
distance
between
the Vacuum chamber.
5) Remove the pipe above
the inlet and wash the mesh.
6) Supply the oil to the
specified
volume.
7) Replace the oil.
8) Use a Leak detector or
the like to find out the leak
position and stop it.
9) Conduct the overhaul of
the Pump and replace the oil
with the ULVAC oil.
10) Overhaul.
a) Clean the oil pit.
b) Check and repair the Oil
distributor valve.
11) Replace the oil.
5.1
3.3
6.2.5
3.2
6.2.2
3.2
6.2.2
3.3
3.2
6.2.2
6.4
6.4
3.2
6.2.2
