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To change pump oil, proceed as follows.
1) Shut down the pump and open the drain port to drain the oil in the pump case.
Upon completion of draining the oil, close the drain port again and run the pump under no
load for approx. 5 seconds to drain the oil from the cylinder.
2) Close the drain port and fill fresh oil through the oil filling port. (Refer to Fig. 4)
Pour oil until the oil level comes between the two level lines of the oil level gauge.
3) If the oil is severely contaminated, fill fresh oil and run the pump for several minutes under
no load to clean the pump interior. Repeat this operation several times depending on the
degree of oil contamination.
4) After changing the oil with fresh oil, run the pump to warm it up and then check the ultimate pressure.
5) If the specified ultimate pressure cannot be attained by oil change, sludge or other deposit
may have collected on the bottom of the pump case. In that event, overhaul is required.
Contact your local ULVAC organization or representative.
DANGER
If the Pump was used to exhaust the toxic gas, the Pump oil as well
as the Pump unit shall become toxic. Pay a full attention.
CAUTION
1) Wear protective gear such as rubber gloves, protective goggles
and the like.
2) Be sure to look through the “1. 2 Chemical Material Safety Data
Sheet” before the lubrication.
3) Should the Vacuum pump oil touched to your hand or entered in
your eye, immediately follow the emergency treatment described
on the MSDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our
guarantee as it might impair the pump performance and shorten the
life cycle.
