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ULVAC CRYOGENICS INCORPORATED
5. Utilities
5.1 Power source (for MP-300K)
Voltage
: 190-220 VAC , three-phase (50Hz)
200-230 VAC, three-phase (60Hz)
Power capacity
: 30 A or above
Power consumption
: 4.3/5.2 kW ( 50/60 Hz )
Connection
: Round type crimping terminal for M6
5.2 Cooling water (for MP-300K)
Recommended flow rate
: 6.7 L/min (400L/hr)
Recommended pressure
: 0.04 MPa
Recommended temperature: 20°C
Water quality
: Tap water equivalent
* Check the water quality on a regular basis.
Use D-type earth ground for safety.
CAUTION
The flow rate of cooling water should be within the following allowable range. When
the flow rate or pressure is too low, it may result in abnormal suspension, failure, or
damaging cooling water pipes due to the temperature rise.
CAUTION
