ULVAC CRYOGENICS INCORPORATED
3
Disposal Considerations
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
We provide Safety Data Sheet (called SDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING
Do not disassemble, pressurize, heat, and/or throw into fire. The adsorber may
explode.
For safe disposal of an adsorber, follow the procedures below.
(1) Depressurize the high pressure helium gas in the adsorber to an ambient
atmospheric pressure. To do so safely, connect the proper tools such as our charging
adaptor (for refrigerator maintenance).
(2) Before proceeding with disposal work, remove the couplings of the adsorber to
visually confirm that it has been depressurized.
WARNING
When it seems that the cryopump and the refrigerator have been used to evacuate a
toxic or dangerous material, you must contact a safety supervisor before discarding,
and discard it after removing the poisonous material according to directions of the
safety supervisor.
