ULVAC CRYOGENICS INCORPORATED
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6. Installation
6.1 Conditions for installation place
(1) Install the equipment at a level and stabilized indoor place. Power supply or
other utilities should be located nearby.
(2) Install the equipment at a well-ventilated place where the ambient temperature
is 10 – 35
°
C and humidity is 80% or less.
(3) Secure the following spaces for maintenance.
<NOTE> Spaces other than the back are required only at the time of
maintenance and check, and do not always need to be secured.
１ ０ ５ ０
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５
０
０
６
０
０
３ ０ ０
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Ｆｒｏｎｔ
ＭＰ－３００Ｋ Ｕｐｐｅｒ
３ ０ ０
Figure 6-1
Maintenance space for MP-300K
(4) Lock the wheels to fix the equipment.
