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ULVAC CRYOGENICS INCORPORATED
and COMP.ALARM lights up again, please contact us.
8.4.3 Corrective action for GN2 AL. State
<System with GN-20i>
(1) Turn OFF the RUN/STOP switch of MP-300K.
(2) Reset and restart the GN-20i. When N
2
gas starts to be supplied from GN-20i,
N2 GAS ALARM light turns off.
(3) Turn ON the RUN/STOP switch of MP-300K to restart.
<System with N
2
gas supply>
(1) Turn OFF the RUN/STOP switch of MP-300K.
(2) Check that the N
2
pressure is above 0.3MPa.
(3) Adjust the pressure regulator inside the MP-300L front door to 0.25MPa or
above, turn off the N2 GAS ALARM light, and then adjust to 0.2MPa. Check
that the flow rate is 20NL/min.
(4) Turn ON the RUN/STOP switch of MP-300K to restart.
8.5 Emergency off
In case of an emergency, press the emergency off button on the front to
disconnect the control power supply and stop all the operation of MP-300K.
To restart, turn the emergency off button to the right.
Turn the emergency OFF switch to the right to clear.
CAUTION
An emergency shutdown might damage the equipment. Do not use this button except
for emergency.
