Ulvac MBS-C, Instruction Manual

Page: 26 / 36

CRYO METER MBS-C Instruction Manual
14 ULVAC CRYOGENICS INCORPORATED
Figure A-3 Dimensions of MBS-C
５００
１００
０
５００ ５００
7
Ｚ４７５１０ＸＸＸＸＸＸＴ ＲＥＶ
Ｘ．Ｘ
サーマルアンカ仕
様
I／O
K(CA)
Ｍａｄｅ ｉｎ Ｊａｐａｎ
Ｓ／Ｎ：
１Ａ Ｘ ２
Ｃｏｎｔａｃｔｓ：２４Ｖ
Ａｎａｌｏｇ：５－０Ｖ/１０－３５０Ｋ，Ｋ（ＣＡ）， Ｏｕｔｐｕｔｓ：
０．１Ａ
２４Ｖ±１０％ Ｐｏｗｅｒ ｉｎｐｕｔ：
ＭＢＳ－Ｃ
ＩＮＣ ＣＲＹＯＧＥＮＩＣＳ ＵＬＶＡＣ
Ｍｏｄｅｌ Ｎｏ．
Ｓｏｌｄｅｒ ＳｎＡｇＣｕ
・ ・ ・
・ ・ ・
(76) (7)
90±1
(
25)
(4
)
ＬＥＤ
φ44.5
(
36)
(30)
31
16
4
(48.5
)
45
110
.5
(65
)
40
61
GRN ON < 20K
ＣＲＹＯ ＭＥＴＥＲ ＭＢＳ－Ｃ
RED FL CRYO T/C DISCONNECTION
RED ON > 280K ORG ON 20K-280K
φ
34
.9
14
Model
Cr
yo
ge
ni
c
Th
er
mo
co
up
le
(mm
)
K
The
rm
oc
ou
pl
e
(m
m)
ＭＢＳ－
Ｃ２
or
Ｃ
２ａ
ＭＢＳ－
Ｃ３
or
Ｃ
３ａ
Cryopumps
Sti
cker
to
indicat
e
Therm
al
An
chor
cor
respondi
ng
model
（
ＭＢＳ－
Ｃ２ａ
,
Ｃ３ａ）
Rev
ision
St
icker
Lot
Number
Sticker
Rated
label
Longe
r
than
50
m
m
CRYO
-U
6.
8,
10,
12,
14
and
L
types
from
8
to
20
CRYO
-U
16,
18,
20,
22,
26,
30
MBS-C
Output
cable
Cry
og
en
ic
The
rm
oc
ou
pl
e:
50
0L
Ｍ３
Ta
p
(S
cr
ew
Dea
pt
h
12
)
C
Fl
ange
Dedica
ted
Crim
ping
Ter
minal
(for
M4)
K
Thermocou
ple:
50
0L
or
10
00L
O-ring
AS
568-020
4
-
φ4.5
(isoste
ry)
K
Thermoco
uple
ca
ble
(Supp
lied
by
Customer
)
Compensat
ing
Lead
Wire
for
K
Thermoc
ouple
Specifi
cations
Pin
B
(-)
Pin
A
(+)
Verifyi
ng
Key
2.
Thermal
anchors
are
use
d
for
cr
yopumps
larger
than
20
inches
in
some
case
s.
1.
Do
not
bend
and
straigh
ten
shea
th
wires
freque
ntly
whe
n
attach
ing
to
or
remov
ing
from
cryopum
ps
(min
imum
ben
d
radius
is
R10)
.
3.
Con
duct
per
iodic
inspectio
ns
and
adjustmen
ts.
UL
VAC
CRYO
GENICS
offer
s
these
ser
vices.
Not
es;