Ulvac MBS-C, Instruction Manual

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CRYO METER MBS-C Instruction Manual
Figure 1-2 CRYO METER MBD-S, MBD-T
1.2 Models of MBS-C
We offer two models of MBS-C according to the length of K thermocouple. The models are
chosen depending on the size of cryopump and its design. Refer to Appended Figure 3 for
the dimensions.
Table 1-1 Models of MBS-C
Model
Cryogenic thermocouple
[mm]
K thermocouple [mm]
MBS-C2, C2a 500 500
MBS-C3, C3a 500 1000
(*1)C2a and C3a are the types for the use with thermal anchors. They have been added
mainly for cryopumps with caliber larger than 20 inches.
1.3 Attached Connectors and Option Cables
If no cable-option is specified, connector plugs shown in Table 3-2 will be attached. Wiring of
the connectors should be done by customers in this case.
If you purchase our equipment that inputs MBS-C signal, you can choose the specified cable
to connect MBS-C “I/O” connector as an option to avoid self-wiring job.
See Table 1-2 for the selection, and refer to “Supplement 2” to know the options in detail.
Table 1-2 Cable Options for MBS-C “I/O” connecting
Part Number Cable Name Length [m] Application Attachment
GP-HM30 MBS-compatible Cable (0.3m only)
Same way as MBS
on wiring and connecting
3 Plugs for wiring
(*1
MBD-HS30 MBD – MBS-C Cable 5,10,15,20
A cable for connecting
MBD and MBS-C
MBD-HS31
MBD - MBS-C Cable with
Contact signals
5,10,15,20
Option cable of MBD
MBS-C contacts available
(*1)
The plugs are same type of MBS attachments. Note that it is easier for cabling MBD and MBS-C by
using MBD-HS30 than using GP-HM30, because other cables are required in the latter case.
Please specify MBS compatible cable when you need to wire in the same way as previous
models of MBS.
When purchased as a system, please contact us for appropriate cables.
2 ULVAC CRYOGENICS INCORPORATED