Ulvac MBS-C, Instruction Manual

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CRYO METER MBS-C Instruction Manual
2. General Specifications
Table 2-1 Ratings of MBS-C
Item
Specifications
Ambient
Conditions
Storage Temperature -20 – 70
℃
(*1)
Operating Temperature
10 – 35 ℃
Ambient Humidity 40 – 85%RH (No Condensation)
Installation Space
Indoors, Installation Height: Less 1000m
Keep away from direct sunlight and
corrosive gases.
Temperature
of 2nd stage
Cryogenic Thermocouple
Cryogenic thermocouple
(Chromel-AuFe0.07%)
10 - 350K( -263 – +77
℃
)
Thermal anchors are used with C2a and
C3a.
LED Status Display
Green Light: 20K or less
(*2)
Orange Light: 20 - 280K
(*2)
Red Light: 280K
and
above
Contact Output 1 (A contact x1)
No-voltage dry contact cunduction:
20K or less
(*1)
Contact Output 2 (A contact x1)
No-voltage dry contact cunduction:
280K
and
above
Contact Rating (as above) DC24V/1A or AC48V/0.5A
Analog Output
5 – 0V/ 10 – 350K
(Refer to Figure A-1.)
Minimum Load 100k
Ω
or
above
Temperature
of Baffle or
1st stage Cryogenic Thermocouple
K thermocouple (Chromel - Alumel)
JIS C 1605-1995 class3
Signal Output
Thermocouple Direct Output
(Refer to Figure A-2.)
Power Source Input Power Source
DC24V (+-10%), 0.1A or less, Rush Current
1A or less.
With protection against reverse connection
(*1)
Environment
Resistance
Insulating Resistance DC500V mega (10M Ω or over)
Withstand Voltage AC500V / min. (less than 4mA )
Resistance to Noise 1kV / min. (First Transient Method)
Resistance to Vibration 0.6G or less (10 – 20Hz)
Machine
Specification
Dimensions
90Wx111Hx53D
(Refer to Appended Figure 3.)
Weight Approx. 0.5kg
Dust and Water-Proof IP21
(*1)
Substrates only
(*2)
AC2 settings: Threshold temperature is changed to 25K from 20K. Please equate 20K as 25K for this
setting.
ULVAC CRYOGENICS INCORPORATED 3