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CRYO METER MBS-C

Instruction Manual

Export Control Policy

We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.

D/N.MGMBS0CE, 2017DR08

ULVAC CRYOGENICS INCORPORATED

Summary of Contents for MBS-C

Page 1: ...port Control Policy We recommend that ALL customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when exporting or reexporting our products D N MGMBS0CE 2...

Page 2: ......

Page 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Page 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Page 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Page 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Page 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 9: ...ordinance etc When it seems that the cryopump or refrigerator has been used to evacuate a toxic or dangerous material you must contact a safety supervisor before discarding and discard it after removi...

Page 10: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 11: ...tible Cable 20 FIGURES Figure 1 1 CRYO METER MBS C 1 Figure 1 2 CRYO METER MBD 2 Figure 3 1 MBS C Bottom View 4 Figure 4 1 Cryogenic Thermocouple Installation 5 Figure 4 2 K Thermocouple Installation...

Page 12: ...fore shipment However please make sure that there is no damage or shortage of delivered items by checking the shipping list below and the exterior of the products COMPONENTS QUANTITY CRYO METER MBS C...

Page 13: ...is isolated from the power line The analog output signal indicates 2nd stage temperature with 5 0 Vdc corresponding to 10K 350K range Also the analog line is isolated from the power line Moreover MBS...

Page 14: ...S C signal you can choose the specified cable to connect MBS C I O connector as an option to avoid self wiring job See Table 1 2 for the selection and refer to Supplement 2 to know the options in deta...

Page 15: ...280K and above Contact Rating as above DC24V 1A or AC48V 0 5A Analog Output 5 0V 10 350K Refer to Figure A 1 Minimum Load 100k or above Temperature of Baffle or 1st stage Cryogenic Thermocouple K ther...

Page 16: ...Power 24V 14 Input Power 0V 7 N C 15 N C 8 FG Frame Ground K CA R05 R2M TAJIMI A K thermocouple output B K thermocouple output Listed below are appropriate connectors for cable wiring Table 3 2 Connec...

Page 17: ...erate nut M4 Figure 4 1 Cryogenic Thermocouple Installation K THERMOCOUPLE Figure 4 2 Place indium sheet where 80K baffle is fixed Figure 4 2 Thermocouple Installation Be sure to put the indium gasket...

Page 18: ...measureme S C analog output line check the tool s input impedance before the connection Lower impedance may cause a voltage drop of MBS C analog line and may damage the system operation 4 In case of...

Page 19: ...en nt t 6 14 Twisted Shielded Cable 20m Max AWG 24 or 0 3mm2 Max POWER I O MBS C Twisted Shielded Cable 20m Max AWG 24 or 0 3mm2 Max ANALOG OUT 2 10 K thermocouple IN U Us se er r s s E Eq qu ui ip pm...

Page 20: ...akawa A B C A B A B A B C D E MBS C POWER RELAY ANALOG OUT K CA A B C A B MBD POWER OUT ANALOG IN AWG 24 or 0 3mm2 max DIGITAL IN K thermocouple IN Control Panel U Us se er r s s E Eq qu ui ip pm me e...

Page 21: ...ble POWER I O MBS C Signal Cable ANALOG OUT 2 10 K thermocouple IN U Us se er rs s E Eq qu ui ip pm me en nt t RELAY AWG 24 or 0 3mm 2 max DIGITAL IN 20K 280K U Us se er r s s E Eq qu ui ip pm me en n...

Page 22: ...C Table 5 1 Status Display of MBS C Color Status K CA Appended Figure 2 I O ANALOG OUTPUT Appended Figure 1 I O Contact Output Pin Pin Red Lights up when temperature of 2nd stage is 280K and above Tem...

Page 23: ...Miswiring Reconnect the cables correctly Refer to Table 3 1 and Figure 4 3 for details 2 Fault of electric circuit Please contact us III ANALOG and K output does not output anything 1 Miswiring Recon...

Page 24: ...CRYO METER MBS C Instruction Manual 12 ULVAC CRYOGENICS INCORPORATED V ANALOG OUTPUT Figure A 1 Analog Output voltage 10K 350K 10K TEMPERATURE K 0 0 0 50 100 150 200 250 300 350 1 0 2 0 3 0 4 0 5 0...

Page 25: ...METER MBS C Instruction Manual ULVAC CRYOGENICS INCORPORATED 13 Ambient Temperature Figure A 2 K Thermocouple output voltage 50 7 6 5 4 3 2 1 0 1 100 150 200 250 300 ELECTROMOTIVE FORCE mV TEMPERATUR...

Page 26: ...12 14 and L types from 8 to 20 CRYO U 16 18 20 22 26 30 MBS C Output cable Cryogenic Thermocouple 500L Tap Screw Deapth 12 C Flange Dedicated Crimping Terminal for M4 K Thermocouple 500L or 1000L O ri...

Page 27: ...g 1 B displays the contents You will not use two tapping screws size 2 9 in the Hood package 1 Also you will not use nuts and washes in the lide locking device package 2 Fig 1 A S Connector kit Packag...

Page 28: ...20 1 8 9 15 Tapping Screw 2 2 x 9 Hood attachment D SUB Female 0967 015 4715 Slide locking device 0967 015 0511 Hood 0967 00 9915 Cable clamper Hood attachment Note You do not use the following parts...

Page 29: ...tly to the end position According to the figure shown here push the right side of the Slide locking device Check that the Slide locking device is positioned shown in the figure with light metallic sou...

Page 30: ...used that the vendor ope production ote2 Note th you choose MBS compatible Cable an he MBS MBD connecting cable set is required N at MBD HS30 requires self wiring of the connector for contact signals...

Page 31: ...e1 for the meaning of Old and New terms in Table 2 B Note 4 MBS adapting cable is available for installing MBS that should be connected to MBS C cables in case of replacing a pump with MBS C to a rese...

Page 32: ...ptacle Pin name Available Plug Spec Pin assignment Function ble 3 A Pin a nts of MBS compatible Cable con POWER R03 PB3M or R03 P3M A 24V DC Input power B Reserved C 0V A B C RELAY R03 PB5M or R03 P5M...

Page 33: ...397 0112 Fax 81 6 6397 0126 Inquiries about cryostats or LN2 generators Kyoto Factory 140 1 Megawa Makishima cho Uji kyoto 611 0041 Japan Tel 81 774 28 5595 Fax 81 774 20 2201 ULVAC CRYOGENICS KOREA I...

Page 34: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 35: ...revised UCN address has changed SERVICE NETWORK has revised WARNING has added Section 4 2 Cable Connection Introduction has revised SERVICE NETWORK has revised Figure 1 2 has been changed MBD S MBD T...

Page 36: ...Revision History This page intentionally left blank R 2 ULVAC CRYOGENICS INCORPORATED...

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