－16－
4.6 Oil charge
Remove an oil charge plug to show in Fig.11, and supply with lubricating oil.
Lubricating oil uses vacuum-pump oil SMR-200.
Refuel it confirm oil quantity with an oil level gauge of Fig.12, and to become
between two lines.
When corrosive gas is exhausted at MBS - 053 - 01, it is also possible to use
fluorine oil (
FOMBLIN YLVAC06/6).
Caution
Lubricating oil side must not protrude two red lines.
Oil flows into pump chamber through a clearance seal when supply too much
with lubricating oil.
When oil is in pump chamber, an ultimate pressure rises, and there is a case to
give a fore pump a failure.
In addition, you cause a sound level increase, the pump breakage when the
pump runs with lack of lubricating oil.
①
Wear protective equipment such as rubber gloves and safety goggles.
②
Be sure to read the attached “Material Data Sheet” before adding oil. If the oil
accidentally comes into contact with your hands or enters your eyes, take proper
measures in accordance with the section “First-aid treatment” shown in “Material
Safety Data Sheet.”
Use only oils specified by us. If other oils are used, the pump performance will
deteriorate or its life will shorten.
Fig.11 Oil plug, oil level gauge position
Fig.12 Oil level gauge
Note
Caution
Oil face
