－5－
2. Specification table
2.1 Specification
Table 1 Specification
Item
Contents
Remarks
1 Pumping
speed
50m
3
/Hr at 1×10
2
Pa
See Fig 3
Change by a fore pump.
2
Ultimate
pressure
4×10
-2
Pa
When used GLD-136 or
GLD-201 for a fore pump.
Different by an ultimate
pressure of the fore pump.
Refer to 3.3 .
3
Recommended
fore pumps
Pumping speed 130
～
240L/min
Two stage oil-sealed rotary vacuum pump
4
Maximum
suction
Pressure
Atmospheric pressure
Refer to 3.4
5
Maximum
compression
ratio
25
6
Temperature
range
0-40
℃
7
Power supply
specifications
AC 100-120V 1
φ
50Hz or 60Hz
AC 200-240V 1
φ
50Hz or 60Hz
Setting of a driver circuit is
necessary in 100V system and
200V system.
Refer to 4.3
Type
DC brushless motor
Out put
200W
Nominal speed
3500min
-1
8 Motor
Maximum power
consumption
250W
Have to power supply when
take external control.
Refer to 5.6
9
speed control
voltage
External rotating speed control voltage
DC 1-5V
10
Intake flange
size
JIS VG-40
11
Outlet flange
size
JIS VF-40
12 Lubricating
oil
vacuum-pump oil SMR-200
13 Oil
quantity
70ml
14 Weight
11kg
15
Noise level
Less then 65 dB(A)
Fore pump is set in the
outside of the measurement
room when the measurement.
Note 1:The ultimate pressure values in the above table are indicated by an Ionization gauge.
Note 2: Vacuum pump oils have different steam pressures, viscosities, and oil properties depending on the type.
Always use the oil sealed rotary vacuum pump oil specified by us. The use of other oils will affect the
pump’s performance
．
(Specified oil: SMR-200)
Note 3:
MBS-053-01 has surface treatment to MBS-053 and it is increasing resistance to corrosive gases.
