Ulvac MBD-D Instruction Manual Download Page 1

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D/N.MGMBD02E,2018.12

ULVAC CRYOGENICS INCORPORATED

CRYO-METER MBD-D

Instruction Manual

Export Control Policy

We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.

Summary of Contents for MBD-D

Page 1: ...INCORPORATED CRYO METER MBD D Instruction Manual Export Control Policy We recommend that ALL customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when...

Page 2: ......

Page 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Page 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Page 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Page 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Page 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 9: ...onal and local laws and regulations We provide Safety Data Sheet SDS of our products upon your request Please contact us if necessary WARNING The cryopumps or cryocoolers may contain residue of hazard...

Page 10: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 11: ...with MBD D 9 5 5 Modbus Protocol 9 6 Troubleshooting 13 Appendix A CRYO METER MBD D External Dimensions 15 FIGURES Figure 1 1 Exterior of MBD D 1 Figure 1 2 MBD D Front Panel 1 Figure 3 1 MBD D Rear...

Page 12: ...ength of the power cable is 3m 2 Types of cables for connecting to MBS C or MBS are listed on Table 1 2 in MBS C instruction manual Please refer to the table and place a separate order for an appropri...

Page 13: ...ple and displays the 1st and 2nd stage temperatures digitally The display shows the second stage temperature from 10K to 350K and the first stage from 45K to 350K The power source should be in the ran...

Page 14: ...ce 2 Voltage 24 VDC 2 5 Current 400mA max Ambient Conditions Indoors below amplitude of 1000m Refrain from direct sunshine or corrosive gasses Temperature while in operation 0 40 C typ 25 C Display ac...

Page 15: ...or R03 P3M Cables are optional A 24V MBS MBS C 24V Power Output B No Connection C 0V ANALOG IN R03 PB2F or R03 P2F Cables are optional A INPUT Analog signal input from MBS MBS C 5 0V 10 350K B ACOM RS...

Page 16: ...t panel all the way seated in 2 Attach the fixing bracket on top and bottom or left and right sides of the MBD D 3 Fasten the screws to fix the MBD D 4 Connect the cables included in the package to th...

Page 17: ...be wired by customers Figure 4 1 Wiring MBD D and MBS C Customer s Control Board Shielded Twisted Cable A B MBS C POWER RELAY ANALOG OUT K CA A B C A B MBD D POWER OUT ANALOG IN Shielded Twisted Cabl...

Page 18: ...d Twisted Cable DIGITAL IN Customer s Control Board C Cu us st to om me er r s s S Sy ys st te em m 20K 280K 3 3 P Po ow we er r C Ca ab bl le e Signal Cable K thermocouple OUT K Thermo Shielded Twist...

Page 19: ...or international standard use components that meet such requirements Refer to IEC60127 IEC60947 or others When the power source of 200V is used like as MBD D it is recommended to install a varistor n...

Page 20: ...Communication Function The MBD D can communicate with the C30S compressor unit Connect the MBD D and C30S at RS485 port with C30S cable optional to display cryopump temperature on the C30S The measur...

Page 21: ...ation with MBD D The procedure to transmit data directly without C30S is as follows Direct Communication Settings From the rear of the MBD D connect the pin No 4 of RS485 and D or RX and TX of RS485 o...

Page 22: ...cation and is experiencing entanglement or disconnection such communication is regarded as invalid The MBD D performs Error Check following the CRC 16 method The CRC 16 calculation is as follows The d...

Page 23: ...ocouple 10K 350K 100 3500 0x4003 1st Stage Temperature x10 Read Only K Thermocouple 45K 350K 450 3500 0x4064 2nd Comparative Temperature x10 Read Write Default 200 20K 0x4065 1st Comparative Temperatu...

Page 24: ...Stage AuFe C disconnection 1 7 Reserved 6 Reserved 5 1st comparative temperature 4 1st measured temperature 1 4 1st comparative temperature 3 1st measured temperature 1st comparative temperature 4 1 3...

Page 25: ...roblem is observed check MBD D power terminal connection status cables supplied by UCI is used or proper voltage is supplied through the cable If none of the above problems is detected MBD D might hav...

Page 26: ...the problem lies in operation not in MBD D If there is no problem in operation follow the instruction in the above column Temperature display is unstable Signal cable DC power cable Power terminal Ca...

Page 27: ...CRYO METER MBD D Instruction Manual ULVAC CRYOGENICS INCORPORATED 15 Appendix A Cryo Meter MBD D External Dimensions Panel cutout dimensions Connector locations...

Page 28: ...16 ULVAC CRYOGENICS INCORPORATED This page intentionally left balnk...

Page 29: ...Chigasaki Kanagawa 253 0085 Japan Sales Tel 81 467 85 8884 Service Engineering Division Tel 81 467 85 9366 Fax 81 467 83 4838 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Che...

Page 30: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 31: ...CRYO METER MBD series Instruction Manual ULVAC CRYOGENICS INCORPORATED R 1 Revision History Date Revision No Contents 2018 12 11 2018 12 First edition...

Page 32: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

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