Ulvac MBD-D, Instruction Manual

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12 ULVAC CRYOGENICS INCORPORATED
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Status Information
Bit Description Active
15 (Reserved)
14 (Reserved)
13 (Reserved)
12 (Reserved)
11 (Reserved)
10 Abnormal Temperature 1
9 1st-Stage(K Thermocouple) disconnection 1
8 2nd-Stage (AuFe-C) disconnection 1
7 (Reserved)
6 (Reserved)
5 1st comparative temperature 4
≤ 1st measured temperature
1
4
1st comparative temperature 3 < 1st measured temperature
< 1st comparative temperature 4
1
3 1st measured temperature
≤ 1st comparative temperature 3
1
2 280K
≤ 2nd measured temperature
1
1
2nd comparative temperature < 2nd measured temperature
<280K
1
0 2nd measured temperature
≤ 2nd comparative temperature
1