CRYO-METER MBD-D Instruction Manual
ULVAC CRYOGENICS INCORPORATED
7
Power Connection and Protection
The MBD-D does not have a fuse internally. Make sure to attach fuses or protectors to the
cables that connect to power supply terminal.
Recommended: 250VAC 3A / Medium time-delay or time-delay type
When it is necessary to comply with regulations of a country or international standard, use
components that meet such requirements. (Refer to IEC60127, IEC60947 or others)
When the power source of 200V is used like as MBD-D, it is recommended to install a
varistor near the terminal board as high surge current is likely to be developed.
(*2)Recommended varistor model: Panasonic ERZV20D471
Figure 4-3
MBD-D Power Circuit
Customer’s Main Power
Source for the Cryopump
System
MBD-D Power Terminal
(Built by Customer)
MBD-D
S1
R1
PE
Protector or
Fuse
3
A
MBD-D Terminal Board
for Power Source
(*2) Varistor
(Green/Yellow)
(White
L
N
E
Summary of Contents for MBD-D
Page 2: ......
Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 10: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 28: ...16 ULVAC CRYOGENICS INCORPORATED This page intentionally left balnk...
Page 30: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 32: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...