Ulvac MBD-D, Instruction Manual

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14 ULVAC CRYOGENICS INCORPORATED
Table 6-2 List of troubleshooting
(2/2)
Problem Part Possible Cause Corrective Action
Temperature
displayed by MBD-
Ｄ
is not consistent with
MBS-C.
Signal cable 1. Wiring problems
2. MBD-
Ｄ
failure
3. MBS-C failure
Check the connection status or problem
of the signal cable between MBD-
Ｄ
and MBS-C (supplied by UCI).
If no problem is observed, check the
voltage at the cable plug, and identify
the corresponding temperature in the
MBS-C instruction manual.
If temperature displayed by the MBD
does not match the above temperature,
MBD-D may have trouble.
Refer to MBS-C instruction manual for
further inspection, or contact us.
Temperature display
does not change
although the
cryopump is in
operation.
Signal cable 1.Cryopump
operation
problems
2.Wiring problems
3.MBD-
Ｄ
failure
4.MBS-C failure
Check if the cryopump is operating
appropriately. Also, check that the
MBS-C display and MBD-D
temperature display are consistent.
If they are consistent, the problem lies
in operation, not in MBD-D.
If there is no problem in operation,
follow the instruction in the above
column.
Temperature display
is unstable. Signal cable
DC power cable
Power terminal Cables and cable
routing problems
(Noise, surge,
etc.)
Check the connection status or troubles
in the signal cable between MBD-D and
MBS-C, and DC power cable (supplied
by UCI).
If no problem is observed, check the
routing of these cables. The cables
should not be located near the power
supply or drive output lines.
Earth conductor of the power line
should be kept apart from the MBD-D
cables.
Keep the MBD-D power terminal from
the main power line of the device that
switching electricity supply.
Refer to the “When wiring” caution, and
contact us to solve the problem.
Characters other than
numeric figures are
shown
Signal cable
DC power cable
Power terminal Cables and cable
routing problems
(Noise, surge,
etc.)
MBD-
Ｄ
failure
Press and hold the SETTING round
button for longer than 3 seconds to
check if this transfers to Settings Menu.
If the menu does not change, check if
the cable routing is appropriate.
If no problem is observed, MBD-D may
have failure.
Please contact us.