Ulvac MBD-D, Instruction Manual

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CRYO-METER MBD-D Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1
1. Features
The CRYO METER MBD-D displays cryogenic temperature used in conjunction with
MBS-C or MBS cryogenic thermocouple temperature meter attached to our cryopump.
The MBD-D receives the analog output signal from the cryogenic thermocouple and
displays the 1st and 2nd stage temperatures digitally. The display shows the
second-stage temperature from 10K to 350K, and the first-stage from 45K to 350K.
The power source should be in the range between 100VAC and 240VAC, and the power
cable terminal be round shaped. The MBD-D communicates with C30S via RS485
(Modbus).
The figure 1-1 shows the exterior of MBD-D.
Figure 1-1 Exterior of MBD-D
Figure 1-2
MBD-D Front Panel
READY Light 1st-stage Temperature
2nd-stage Temperature
COM Light
SETTING buttons