Ulvac EMP-14A, Instruction Manual

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ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ················································································· 1
Disposal Considerations ·········································································· 3
1. General Description of the System ···················································· 5
1.1 Liquid nitrogen generator
（
EMP-14A
）
······································· 5
1.2 Helium gas compressor (model:SA115-C) ···································· 5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-10i) ·· 5
1.4 Membrane Nitrogen Generator (type IM-120) ································ 5
2. Component Description ··································································· 6
2.1 Front view of EMP-14A (Figure 2-1) ············································ 7
2.2 Operation panel of EMP-14A (Figure 2-2) ····································· 7
2.3 Inside of EMP-14A front door and lower panel (Figure 2-3)············· 11
2.4 Inside the lower panel on the back ············································ 11
2.5 EMP-14A Electrical circuit
（
Figure 2-4
）
··································· 12
2.6 EMP-14A Top side (Figure 2-5) ················································ 12
3. Flow Diagram ·············································································· 13
4. Specifications ·············································································· 14
4.1 Liquid nitrogen generator ························································ 14
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator ·············· 14
4.3 Membrane nitrogen gas generator ············································ 14
5. Utilities ······················································································ 15
5.1 Power source (for EMP-14A) ··················································· 15
5.2 Power source (for the use with GN-10i) ······································ 15
5.3 Dry air for IM-120 (when using IM-120) ······································ 15
6. Installation ·················································································· 16
6.1 Conditions of installation site ··················································· 16
6.2 Connection of GN-10i to power source ······································ 17
6.3 Dry air connection to IM-120 ···················································· 17
6.4 Utility connection of EMP-14A ·················································· 17