16
ULVAC CRYOGENICS INCORPORATED
6. Installation
6.1 Conditions of installation site
(1) Install the equipment at a level and stabilized indoor place where direct
sunshine can be avoided and well ventilated. Power supply or other utilities
should be located nearby.
(2) The ambient temperature should be from 10
°
C to 35
°
C and humidity is 80% or
below.
(3) Keep the following spaces for maintenance.
Spaces other than the back are required only at the time of maintenance and
check.
背面
正面
ＥＭＰ－１４Ａ上面
３
０
０
６
０
０
７
５
０
６ ０ ０
３ ０ ０
※ 背面以外のスペースは、保守点検時にのみ必要であり、
常時確保していただく必要はありません。
Figure 6-1 Maintenance space for EMP-14A
(4) Lock the wheels to fix the equipment.
EMP-14A
Top side
Back
Front
Spaces other than the back are required only
at the time of maintenance and check.
