ULVAC CRYOGENICS INCORPORATED
I
Introduction
Thank you for choosing our products. This instruction manual gives information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and
are familiar with the safety precautions required to avoid possible injury. To ensure proper
use of this product, read this instruction manual carefully and keep this manual close at
hand so that you can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read relevant
instruction manuals carefully.
(1) It is strictly prohibited to duplicate or distribute this instruction manual or any of its
parts to a third party without written permission from ULVAC CRYOGENICS.
(2) Information in this document is subject to change without notice due to specification
change or the improvement of the product.
(3) If you have any questions or comments on this document, please do not hesitate to
contact us. The phone numbers of local customer support centers are listed at the
end of this manual.