Ulvac CR16B, Instruction Manual

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Contents-3
YK16-0010-DI-002-02
Tables and Illustrations
Fig. 1 Vacuum mechanism map ............................................................................................................ 4
Fig. 2 CR60B Outline dimensional drawing .......................................................................................... 6
Fig. 3 Name of each part ....................................................................................................................... 7
Fig. 4 Typical pump layout................................................................................................................... 10
Fig. 5 Installation drawings of air filter .................................................................................................. 11
Fig. 6 Explanatory diagram of gas ballast option : 1 manual valve ..................................................... 12
Fig. 7 Explanatory diagram of gas ballast option: Solenoid valve + manual valve ............................. 12
Fig. 8 Explanatory diagram of method for solenoid valve wiring ........................................................ 13
Fig. 9 Recommended system of N2 purge gas piping ........................................................................ 13
Fig. 10 Mounting method for guard ..................................................................................................... 15
Fig. 11 Reference system diagram of remote control ......................................................................... 16
Fig. 12 Pumping speed curves ............................................................................................................ 20
Fig. 13 Power-Pressure curves ........................................................................................................... 20
Table. 1 Standard accessories ............................................................................................................ viii
Table. 2 Details model list...................................................................................................................... 5
Table. 3 Performance specifications ..................................................................................................... 5
Table. 4 List of rated power capacity and recommended breaker ...................................................... 14
Table. 5 Specifications list for connector ............................................................................................. 15
Table. 6 Pre-starting check points ....................................................................................................... 17
Table. 7 Checking item list .................................................................................................................. 22
Table. 8 Trouble check list ................................................................................................................... 23