Ulvac CR16B, Instruction Manual

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YK16-0010-DI-002-02
Inlet piping <Mounting>
Power Supply wiring <Mounting>
Operation
Check and ensure that any of hazardous energy is blocked before starting the
operation.
WARNING
(1) Check and ensure that any of hazardous energy is blocked before starting
the operation.
(2) Entitled staff should conduct the wiring operation. Erroneous wiring work
might cause a fire.
(3) Conduct the wiring operation correctly in compliance with laws and rules
concerning the safety (e.g. Fire Defense Law, Electric Equipment
Technology standard, Internal line cord) in the country and region you use
the product.
(4) Ensure to have a correct grounding.
(5) You are recommended further to install a dedicated Leak breaker. You
have a risk of getting electrical shock in case of failure or electric leakage.
WARNING
(1) Do not open pump cover during operation. Do not touch the motor,
vacuum pump or piping because their temperature get very high. You
have a risk of getting burned if a part of your body touched it.
(2) Do not run the Pump on blocking the exhaust outlet or putting any device
that might hamper gas passage onto the outlet. There is a risk that the
pressure inside the vacuum pump rises up and it causes break or oil leak
of the casing or oil level gauge resulting in overload of the motor.
WARNING
(1) Do not operate the Pump in hazardous area (where there is a risk of
creating hazardous atmosphere by explosive gas). It might cause injury
and/or fire.
(2) Do not attempt to put your hand or object in the opening of the ventilation;
you have a risk of getting electrical shock, injury or casing a fire.
(3) Strictly refrain from putting any combustible substance in and around 1m
of the Vacuum pump; there is a risk of getting a fire.
(4)
This unit is air-cooled. Do not put a wall or obstacle in and around 0.3m of
the opening the ventilation. You have a risk of getting burned or fire
caused by over heat.
CAUTION