STACIS
2100 Piezoelectric Isolation System - Installation & Operation Manual
P/N 96-28765-01
Page 30 of 43
ERROR
LF ALARM
Required stroke of isolation system
exceeds the dynamic range of the
actuators.
HF ALARM
High Frequency Oscillation
INDICATIONS
•
The SYSTEM STATUS LED turns
to amber.
•
A message similar to the following
is displayed on the LCD:
A l a r m : L o w F r e q O s c
I s o l a t o r # 3 A x i s Y
•
Alarm Relay is triggered
•
The SYSTEM STATUS LED
turns to amber.
•
A message similar to the
following is displayed on the
LCD:
A l a r m : H i g h F r e q O s c
I s o l a t o r # 3 A x i s Y
•
Alarm Relay is triggered
FAULT DETECTED
Repeated low frequency instability.
Actuator dynamic range is exceeded.
Control signal is over a preset
threshold (near saturation) for more
then 60% of any given 60 second
period.
Constant instability at a frequency
between 10 Hz and 150 Hz.
Actuators generate a drumming
sound.
A channel oscillates for more then
360 consecutive cycles at a constant
frequency.
PROBABLE CAUSE
Heavy mechanical disturbances
applied to the floor near the STACIS
installation.
Heavy mechanical disturbances
applied directly to the payload (moving
stage problems, maintenance work,
etc.).
Load adjustment for one or more of the
isolators is incorrect.
Soft floor causing the isolator to tilt
(horizontal channels only)
One or more isolators have failed.
Floor is soft and does not meet the
installation requirements.
Load for one or more isolators is
incorrect.
Gain for an isolator is too high in one
or more axes, making servo loop
unstable.
One or more actuators has failed
RECOMMENDATION-
TROUBLESHOOTING
Check the operation of the system located on the payload for malfunction.
Verify that the reported isolator rests solidly on the floor/surface without any
rocking. Replace the base pad with a new one as necessary.
Check all isolators for proper loading and adjust loading as necessary.
Reduce loop gain by 3dB (3 clicks of (
-
) menu key) for the channel shown in the
alarm message.
If none of the above helps, contact TMC for assistance.
Table 5: Alarm Conditions
5.3.9
Select Number of Isolators.
The DC-2000 controller can be configured to control 2, 3, or 4 isolators. When purchased as part of a
STACIS
system, i.e. isolators and controller, the correct number of isolators is pre-configured at TMC
before to shipment. This function makes it possible to update the number of isolators in the event of a
change in the installation, e.g. an isolator is added or removed due to changes in the weight of the
payload, etc. The number of isolators may also need to be re-configured when the “Restore Defaults”
option is used, or the controller software is updated.
