2
Functional Description
Mass Spectrometer
42
TSQ Quantum XLS Series User Guide
Thermo Scientific
Figure 27.
Vacuum manifold (interior)
Turbomolecular Pump
A Leybold TW220/150/15S double-inlet turbomolecular pump provides the vacuum for the
ion source, Q0 quadrupole region, and analyzer region of the vacuum manifold. The
turbomolecular pump mounts onto the top of the vacuum manifold (
The turbomolecular pump has two pumping inlets:
• A high-vacuum inlet at the top of the rotor stack, which evacuates the analyzer chamber
• An interstage inlet about halfway down the rotor stack, which evacuates the ion source
and Q0 quadrupole chambers
Ion gauge
O-ring
Turbomolecular pump
Collision cell
chamber
Analyzer
chamber
Q0 quadrupole
chamber
Ion source
chamber
Baffle