Contents
v
iCAP RQ Pre-Installation Requirements Guide (P/N BRE0009927, Revision A)
Thermo Scientific
..........................................................................
5-1
Cooling Water ............................................................... 5-2
Technical Data of Recirculating Chiller ...................... 5-3
Gas Supply..................................................................... 5-5
Gas Supply Connections ............................................. 5-5
Plasma and Cooling Gas ............................................. 5-7
CCT Gas .................................................................... 5-8
Two-Stage Gas Pressure Regulators........................... 5-11
Additional Gas .......................................................... 5-12
Cleaning Agents ........................................................... 5-14
General Pre-Installation Information
................................
6-1
Instrument Arrival.......................................................... 6-2
Transportation Risk .................................................... 6-2
Installation ..................................................................... 6-3
Installing the System ................................................... 6-3
Key Operator .............................................................. 6-3
Advanced Training Courses ........................................ 6-4
Preventive Maintenance .............................................. 6-4
Operating Environment ................................................. 6-5
Lighting ...................................................................... 6-5
Particulate Matter ....................................................... 6-5
Quality of Power......................................................... 6-5
Electrostatic Discharge ................................................ 6-9