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Thermo Scientific

iCAP RQ Pre-Installation Requirements Guide (P/N BRE0009927, Revision A)

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Summary of Contents for iCAP RQ ICP-MS

Page 1: ...iCAP RQ ICP MS Pre Installation Requirements Guide BRE0009927 Revision A November 2016 ...

Page 2: ...iCAP RQ ICP MS Pre Installation Requirements Guide BRE0009927 Revision A November 2016 ...

Page 3: ...ne Instruments Inc Dranetz is a registered trademark of Dranetz Technologies Inc ShockWatch is a registered trademark of Shockwatch Inc Sogevac is a registered trademark of Oerlikon Leybold Vacuum GmbH All other trademarks are the property of Thermo Fisher Scientific Inc and its subsidiaries Thermo Fisher Scientific Inc provides this document to its customers with a product purchase to use in the ...

Page 4: ...anslations into other languages and software packages may be available there as well With the serial number S N of your instrument request access as a customer via www thermoscientific com Technicaldocumentation For the first login you have to create an account Follow the instructions given on screen Please accept the invitation within six days and log in with your created Microsoft password Sugge...

Page 5: ...Contacting Us Suggestions to the Manual iii iCAP RQ Pre Installation Requirements Guide P N BRE0009927 Revision A Thermo Scientific ...

Page 6: ...vice and Securing the Handles 2 8 Placing the System 2 10 Workbench for Instrument 2 10 Floor Space for the System 2 11 Placing the Fore Vacuum Pump 2 11 Placing the Data System 2 13 Chapter 3 Operating Environment 3 1 Temperature 3 2 Exhaust System 3 3 Heat Generation and Dissipation of System 3 5 Air Conditioning 3 6 Humidity 3 6 Altitude 3 6 Vibration 3 7 Airborne Noise Emission 3 7 Radio Frequ...

Page 7: ...and Cooling Gas 5 7 CCT Gas 5 8 Two Stage Gas Pressure Regulators 5 11 Additional Gas 5 12 Cleaning Agents 5 14 Chapter 6 General Pre Installation Information 6 1 Instrument Arrival 6 2 Transportation Risk 6 2 Installation 6 3 Installing the System 6 3 Key Operator 6 3 Advanced Training Courses 6 4 Preventive Maintenance 6 4 Operating Environment 6 5 Lighting 6 5 Particulate Matter 6 5 Quality of ...

Page 8: ... 15 16 A Europe 20 A North America Japan Protection type acc IEC 60529 IP 20 Fore vacuum pump Voltage 200 240 V 10 50 Hz 60 Hz Power 1 6 kW 50 Hz 1 9 kW 60 Hz Operating Environment Temperature Laboratory temperature 15 to 35 C Optimum operation temperature 18 to 21 C Exhaust Exhaust velocity plasma 6 to 8 m s Exhaust flow plasma 67 to 90 m h Exhaust velocity heat 4 to 6 m s Exhaust flow heat 45 to...

Page 9: ...MPa 1 5 bar Ammonia or mixtures with helium for QCell Max content of ammonia 1 Purity 99 999 or better Max water content 2 ppmv Supply rate max 10 mL min per channel Pressure min 0 05 MPa 0 5 bar max 0 15 MPa 1 5 bar Additional Gas Argon Purity 99 996 or better Max water content 5 ppmv Supply rate max 1 L min per channel Pressure max 0 1 MPa 1 bar Pure helium or mixtures with argon Purity 99 996 o...

Page 10: ...e 15 16 A Europe 20 A North America Japan Protection type acc IEC 60529 IP 20 Fore vacuum pump Voltage 200 240 V 10 50 Hz 60 Hz Power 1 6 kW 50 Hz 1 9 kW 60 Hz Operating Environment Temperature Laboratory temperature 15 to 35 C Optimum operation temperature 18 to 21 C Exhaust Exhaust velocity plasma 6 to 8 m s Exhaust flow plasma 67 to 90 m h Exhaust velocity heat 4 to 6 m s Exhaust flow heat 45 t...

Page 11: ...mmonia or mixtures with helium for QCell Max content of ammonia 1 Purity 99 999 or better Max water content 2 ppmv Supply rate max 10 mL min per channel Pressure min 0 05 MPa 0 5 bar max 0 15 MPa 1 5 bar Additional Gas Argon Purity 99 996 or better Max water content 5 ppmv Supply rate max 1 L min per channel Pressure max 0 1 MPa 1 bar Pure helium or mixtures with argon Purity 99 996 or better Max ...

Page 12: ...y correct gas and solvent supplies and proper waste and exhaust systems This iCAP RQ Pre Installation Requirements Guide provides information to assist in planning and preparing your lab site for the system prior to delivery and installation Read each section carefully to be sure that your laboratory is ready for the installation of your system For additional information request specific pre insta...

Page 13: ...te data input and output via the computer Messages displayed on the screen are represented by capitalizing the initial letter of each word and by italicizing each word Input that you enter by keyboard is identified by quotation marks single quotes for single characters double quotes for strings For brevity expressions such as choose File Directories are used rather than pull down the File menu and...

Page 14: ...ific iCAP RQ Pre Installation Requirements Guide P N BRE0009927 Revision A 1 3 Topic Headings The following headings are used to show the organization of topics within a chapter Chapter 1 Chapter Name Second Level Topics Third Level Topics Fourth Level Topics ...

Page 15: ...Using this Manual Typographical Conventions 1 4 iCAP RQ Pre Installation Requirements Guide P N BRE0009927 Revision A Thermo Scientific ...

Page 16: ...te must be prepared The hallways and doors must be wide enough to allow passage of the instrument NOTICE It is your responsibility as the operator to provide a suitable location a source of power of acceptable quality a suitable operating environment and a proper exhaust system Contents Entrance Requirements on page 2 2 Dimensions and Weights on page 2 2 Moving the Instrument on page 2 3 Placing t...

Page 17: ...Weights The iCAP RQ ICP MS instrument is shipped in a container Other modules such as the fore vacuum pump are shipped in separate containers For dimensions and weights see Table 2 1 NOTICE Owing to the climatic conditions in some tropic regions some boxes may be replaced by special packings As a result the dimensions will differ from those given in Table 2 1 Additional weights and the dimensions ...

Page 18: ...nd right side of the instrument Moving the Instrument NOTICE After arrival the iCAP RQ ICP MS instrument must be stored as packed by Thermo Fisher Scientific for at least 24 hours at an environmental condition of 15 to 35 C and a relative humidity of 20 to 80 before connecting it to the power supply Figure 2 1 Dimensions of iCAP RQ instrument 1102 1020 665 772 Front View Left View Right View Top V...

Page 19: ... pallet jack when moving the instrument into another room The following instructions assume that the instrument has been moved to the installation site with a pallet jack and the top cover of the transport crate has been removed To mount the lifting device and move the instrument onto the bench 1 Gather four to six people trained in lifting heavy loads and appoint one person that takes command and...

Page 20: ...andles with the two ends of the twice bent tube pointing toward the instrument 5 Position the correct holes in the metal sheet of the lifting device above the handles of the instrument see Figure 2 3 Each lifting device consists of a folded metal sheet with holes and a twice bent tube It is delivered with four hexagon screws four washers and two clamps 6 To mount a lifting device onto the handles ...

Page 21: ...he second pair of screws and washers to the second handle 8 Repeat for the second lifting devices at the other side of the instrument Make sure that the device is aligned parallel to the side of the instrument Check that the lifting device is tightly attached to the handles The ends of the lifting devices must be aligned with each other as shown in Figure 2 5 Labeled Components 1 hexagonal screw 4...

Page 22: ... 2 6 consist of synthetic material that has a low frictional resistance and should easily slide above the surface of your work bench Labeled Components 1 lifting device 2 2 transport pallet 3 front of iCAP RQ system Figure 2 5 Lifting devices attached to instrument top view 1 2 3 center of gravity CAUTION Top Heavy Load The mass spectrometer might tip over while being moved in the laboratory and c...

Page 23: ... Securing the Handles After the iCAP RQ ICP MS has been moved to the correct position for operation dismount the lifting device and store away the handles on the left side At the right side of instrument the handles can also be used to mount a drip tray To dismount the lifting device 1 Unscrew the two clamps 3 in Figure 2 4 of the lifting device 2 Dismount the lifting device 3 Repeat for the lifti...

Page 24: ...driver and push the handle into its housing See 3 in Figure 2 7 To mount the drip tray 1 At the right side of the instrument pull the handles outside 2 To mount the drip tray 1 in Figure 2 8 onto the handles place the two bolts at the bottom of the drip tray into the notches of the handles See 2 in Figure 2 8 Labeled Components 1 spring 2 handle 3 handles in housing Figure 2 7 Shoving handle into ...

Page 25: ...in an emergency at all times To allow shutting off the instrument in an emergency free access must be possible at any time to the main power switch and the power connections at the right and left side of the instrument Allow at least 70 to 100 cm of clear space left of the system for clearance of the gas lines electrical connections as well as for the exhaust line and vacuum hose of the fore vacuu...

Page 26: ...le for connecting the pump to the mains and an exhaust hose for connecting the fore vacuum pump to the exhaust system instrument A noise reduction cover and a drip pan for the fore vacuum pump are available as options The fore vacuum pump must be placed on a drip pan of sufficient volume Order a drip pan at Thermo Fisher Scientific or use a suitable one of your own NOTICE Thermo Fisher Scientific ...

Page 27: ... 4 in Figure 2 10 tubing of 2 7 m length with an OD of 20 mm ID 13 mm is delivered with the instrument If you need a longer vacuum hose contact Thermo Fisher Scientific Because of the large bending radius of the hose the actual reach of the vacuum hose is shorter than the given length Either run the vacuum hose left of the workbench or make a cutout through the bench for it The cutout must have mi...

Page 28: ...supporting the weight of the data system and a printer if applicable A printer is not delivered with the instrument The iCAP RQ ICP MS instrument is connected to the computer via a USB cable see Figure 2 11 Figure 2 12 shows typical data system hardware components Labeled Components 1 data connection to computer Figure 2 11 Connections for computer Figure 2 12 Typical data system workbench 1 monit...

Page 29: ...he data system must be located next to the workbench that holds the mass spectrometer For a connection length of more than 3 m an active hub must be placed between the instrument and the computer The length of the USB cable between the iCAP RQ ICP MS instrument and the hub is limited to 3 m whereas between the hub and the computer a cable length of 5 m can be used This hub must exclusively be used...

Page 30: ...the immediate vicinity of the system without producing excessive draft The relative humidity of the operating environment must be between 20 and 80 with non condensing and non corrosive atmosphere NOTICE It is your responsibility as operator to provide an acceptable operating environment Contents Temperature on page 3 2 Exhaust System on page 3 3 Heat Generation and Dissipation of System on page 3...

Page 31: ...ental condition of 15 to 35 C and a relative humidity of 20 to 80 before connecting it to the power supply The mass spectrometer is designed to operate at the temperatures specified in Table 3 1 NOTICE As the laboratory temperature increases system reliability decreases All electronic components generate heat while operating Table 3 1 Temperature requirements for iCAP RQ instruments Specification ...

Page 32: ...ill only install your iCAP RQ system when an adequate exhaust system is present and functioning Exhaust gas venting must comply with all local environmental codes The exhaust ports at the iCAP RQ instruments have an outer diameter of 60 3 mm for both plasma exhaust and heat exhaust Flexible hoses with 63 mm ID are recommended for connection to the exhaust ports Thermo Fisher Scientific delivers ho...

Page 33: ...d of a flexible hose with an inner diameter of 63 mm and thus the flow rate should meet the specifications given in Table 3 2 NOTICE The exhaust system must be tested for leakage before you connect it to the iCAP RQ instrument Table 3 2 Specifications for the iCAP RQ exhaust Exhaust type Hose ID mm Exhaust Velocity m s Exhaust Flow m3 h Plasma 63 6 to 8 67 to 90 Instrument Heat 63 4 to 6 45 to 67 ...

Page 34: ...t dissipation of the mass spectrometer and other heat sources during analysis see Table 3 3 NOTICE Water cooled chillers minimize the heat dissipation into the laboratory environment NOTICE The values listed in Table 3 3 are for a laboratory temperature of 23 C and a cooling water temperature of 20 C A higher room temperature and or lower cooling water temperature will increase the heat generation...

Page 35: ...g sources Temperature fluctuation of 1 C or more over a 10 minutes period can affect performance Humidity The relative humidity of the operating environment must be between 20 and 80 with non condensing and non corrosive atmosphere It is recommended that your laboratory be equipped with a temperature and humidity monitor to ensure that your laboratory is always within the required temperature and ...

Page 36: ...orne Noise Emission The A weighted emission sound pressure level created by the iCAP RQ mass spectrometer and fore vacuum pump at work stations does not exceed 70 dB A Radio Frequencies The iCAP RQ system withstands electric fields of 1 V m and a frequency range of 80 MHz to 2 7 GHz without any influence to operation iCAP RQ instruments are designed to work in a controlled electromagnetic environm...

Page 37: ...his waste container must be provided by the customer During installation the waste container must be inert against 2 nitric acid as well as against 0 5 hydrochloric acid NOTICE It is recommended that waste containers be placed in some type of secondary containment such as a plastic bin in case of a spill or overflow To prevent the laboratory to be accidentally contaminated by solvent waste protect...

Page 38: ...t your instrument performs optimally and is not damaged by line power fluctuations verify that you comply with all power quality requirements listed in this manual NOTICE It is your responsibility as the operator to provide a source of power of acceptable quality for the operation of your system Contents Electrical Power Requirements on page 4 2 Power Connections on page 4 2 Auxiliary Wall Outlets...

Page 39: ...rantee disturbance free operation Power Connections The electrical wall outlet for the main power of the iCAP RQ instrument should be located at the wall near the intended location of the instrument ideally at the left side of the instrument The instrument is shipped with a standard IEC 60320 socket and will be shipped with power cables suitable for your country Depending on your area different ty...

Page 40: ...fore vacuum pump must be established The green yellow grounding cable delivered with the control cable for the fore vacuum pump must be connected to the grounding bolt on the instrument see Figure 4 1 and the grounding screw on the fore vacuum pump see Figure 4 2 If you need a longer grounding cable contact Thermo Fisher Scientific The mounting instructions delivered with the grounding cable must ...

Page 41: ... tripping characteristic C or D For information on the power outlet requirements also see the manufacturer s manuals Fore Vacuum Pump The fore vacuum pump requires a dedicated power outlet that complies with the specifications as indicated on the rating plate of the fore vacuum pump see Table 4 2 Quality of Power The iCAP RQ instrument complies with the requirements listed in Table 4 3 See Chapter...

Page 42: ...ervice engineer might also require certain solvents for the installation verification of your system NOTICE To prevent delays during installation make sure to have a sufficient amount of gas available for at least 40 h operation NOTICE It is your responsibility as the operator to provide correct gas and solvent supplies for the operation of your system Contents Cooling Water on page 5 2 Gas Supply...

Page 43: ...cations The water temperature should be in the range specified in Table 5 1 Lower temperatures could lead to a condensation of atmospheric water vapor NOTICE Make sure the specifications in Table 5 1 are met when connecting the instrument to an inhouse water supply A water hose black with an OD of 12 mm ID 8 mm and a length of 10 m is delivered with the instrument The cooling water connections to ...

Page 44: ...onally delivered with the NESLAB ThermoFlex 2500 recirculating chiller with closed circuit cooled by a refrigerating device A schematic of the water circulation including a filter is shown in Figure 5 2 Figure 5 1 Cooling water connections at the left of iCAP RQ system Figure 5 2 Cooling circuit with recirculating water chiller iCAP RQ Chiller Water In Water In Water Out Water Out Filter ...

Page 45: ... power supply of the chiller see Auxiliary Wall Outlets on page 4 4 Table 5 2 Chiller specifications Chiller Component Specification Cooling Capacity at 20 C ambient temperature 2 2 kW 50 Hz 2 5 kW 60 Hz Ambient Temperature 10 to 40 C Water Temperature 5 to 40 C Stability of Temperature Regulation 0 1 C Reservoir Volume 7 2 L Flow Rate Turbine Pump 60 Hz Turbine Pump 50 Hz 13 3 L min at 0 41 MPa 4...

Page 46: ... All gas flow rates given relate to standard conditions NOTICE When operating the iCAP RQ instrument with hazardous gas an external warning sensor must be installed in the vicinity of the instrument In case of the iCAP RQ ICP MS 2 channel systems a hydrogen sensor must be installed in the vicinity of the instrument Gas Supply Connections NOTICE Note the different torque plates for iCAP RQ 1 channe...

Page 47: ...ection plate may look different Table 5 3 lists the connector types for the gases Labeled Components 1 additional gas 1 inlet 2 additional gas 2 inlet 3 argon gas inlet 4 CCT2 inlet 5 CCT1 inlet Figure 5 4 Gas connection at the left of iCAP RQ 2 channel system Table 5 3 Gas connections at iCAP RQ ICP MS Label Connection Tubing Capillary Argon push in fitting 6 mm OD CCT 1 bulk head union 1 16 OD C...

Page 48: ...t must fit the maximum primary pressure specification of the argon gas laboratory supply Check whether your maximum primary pressure is 30 MPa 300 bar 23 MPa 230 bar or 20 MPa 200 bar and choose accordingly Connection of the laboratory argon supply to the iCAP RQ instrument is made via a push in fitting A recommended set up for the argon supply is shown in Figure 5 5 3 m polyurethane tubing will b...

Page 49: ...he following services must be supplied by the customer Gas Two stage gas pressure regulator for 1 16 capillary 1 4 to 1 16 adapter will be supplied with the instrument Helium A CCT installation test is performed with helium gas to pressurize the QCell See Table 5 5 for details of the helium gas requirements Labeled Components 1 iCAP RQ MS 2 argon inlet 3 pressure gauge 4 shut off valve 5 gas sourc...

Page 50: ...the hydrogen gas requirements Supply Rate max 10 mL min per channel Pressure min 0 05 MPa 0 5 bar max 0 15 MPa 1 5 bar using a two stage pressure regulator 200 bar to 3 bar Table 5 5 CCT gas requirements for helium continued Gas Requirement Specification Table 5 6 Gas requirements for hydrogen 1 channel system Gas Requirement Specification Purity 99 999 or better Maximum Water Content 2 ppmv Suppl...

Page 51: ...5 bar max 0 15 MPa 1 5 bar using a two stage pressure regulator 200 bar to 3 bar Table 5 7 Gas requirements for hydrogen 2 channel system continued Gas Requirement Specification Table 5 8 Gas requirements for oxygen Gas Requirement Specification Purity 99 999 or better Maximum Water Content 2 ppmv Supply Rate max 10 mL min per channel Pressure min 0 05 MPa 0 5 bar max 0 15 MPa 1 5 bar using a two ...

Page 52: ... outlet pressure max 0 8 MPa 8 bar and it must fit the maximum primary pressure specification of the CCT gas laboratory supply Check whether your maximum primary pressure is 30 MPa 300 bar 23 MPa 230 bar or 20 MPa 200 bar and choose accordingly Each country has a different standard outlet fitting for its gas supplies and therefore each country will require a different regulator Examples for regula...

Page 53: ...et pressure of max 0 1 MPa 1 bar and they must fit the maximum primary pressure specification of the additional gas laboratory supplies Check whether your maximum primary pressure is 30 MPa 300 bar 23 MPa 230 bar or 20 MPa 200 bar and choose accordingly Argon Pure Helium or Mixtures with Argon For some applications the use of additional gas is beneficial The gas requirements are detailed in Table ...

Page 54: ...ed in Table 5 13 Methane Mixtures with Argon NOTICE The maximum content of methane is 4 5 The gas requirements are detailed in Table 5 12 Table 5 12 Additional gas requirements for oxygen Gas Requirement Specification Purity 99 996 or better Maximum Water Content 5 ppmv Supply Rate max 1 L min per channel Pressure Regulator Output max 1 bar using a two stage pressure regulator 200 bar to 3 bar Tab...

Page 55: ...gents available A diluted solvent like isopropanol in water in accordance with your local safety practices NOTICE Do not use ethanol for cleaning Distilled water Supply Rate max 1 L min per channel Pressure Regulator Output max 1 bar using a two stage pressure regulator 200 bar to 3 bar Table 5 14 Additional gas requirements for methane continued Gas Requirement Specification ...

Page 56: ...uide P N BRE0009927 Revision A 6 1 Chapter 6 General Pre Installation Information This chapter provides general pre installation information for your instrument Contents Instrument Arrival on page 8 2 Installation on page 8 3 Operating Environment on page 8 5 ...

Page 57: ...age and please let Thermo Fisher Scientific field service engineers check for further damage NOTICE If the instrument shipping container ShockWatch or other indicator shows any evidence of damage or mishandling during shipment do NOT open the container Call your Thermo Fisher Scientific representative for instructions on what to do If the system arrives safely proceed with the following instructio...

Page 58: ...cientific field service engineer will demonstrate the following The basics of equipment operation and routine maintenance The performance specifications that are in force at the time of the purchase of the system NOTICE Consumables sent with the system are intended for use by the Thermo Fisher Scientific field service engineer during the installation Key Operator Experience has shown that the maxi...

Page 59: ...instrument For information concerning course schedules and fees please contact the following address or your local Thermo Fisher Scientific office Thermo Fisher Scientific Hanna Kunath Str 11 28199 Bremen Germany Phone 49 0 421 54 93 0 Fax 49 0 421 54 93 426 E mail training bremen thermo com Preventive Maintenance Routine and preventive maintenance of the instrument is in the responsibility of the...

Page 60: ...st smoke or other particulate matter For reference the air should contain fewer than 35 106 particles per cubic meter 1 106 particles per cubic foot in excess of 5 μm Dust can clog the air filters causing a reduction in air flow around electronic components Dust will also form a layer on electronic components that will act as an insulating blanket and thus reduce the heat transfer from the compone...

Page 61: ...rovide a continuous record of line performance by analyzing and printing out information on three types of voltage disturbances Slow average Sag and surge Transient In the first two cases the duration as well as the amplitude of the disturbance is indicated by time interval recording The power line must be monitored continuously for seven consecutive days 24 hours a day If inspection of the printo...

Page 62: ... consider power conditioners which can control both of these problems Your electrician should install the buck boost transformer before the installation of your system is started NOTICE For compliance and safety ensure that your power conditioning devices are certified by recognized domestic and international organizations for example UL CSA TÜV and VDE Uninterruptible Power Supply If your local a...

Page 63: ...ne conditioner or in locating a power consultant in your area Specifying power conditioning equipment is a complex task that is best handled by a company or consultant specializing in that field A selection of such companies is listed in Table 6 15 NOTICE Thermo Fisher Scientific does not endorse any manufacturer nor does it endorse products other than its own Companies and products listed in this...

Page 64: ...a chair padded with polyurethane foam in a room at 20 relative humidity can cause as much as 18000 V of electrostatic potential to develop on your skin or 1500 V at 80 relative humidity Working in laboratory coats and clothing made of synthetic fibers can cause the accumulation of static electricity on your skin Polystyrene cups and packing materials typically have a considerable electrostatic cha...

Page 65: ...General Pre Installation Information Operating Environment 6 10 iCAP RQ Pre Installation Requirements Guide P N BRE0009927 Revision A Thermo Scientific ...

Page 66: ... to equipment 6 2 data system dimensions 2 14 placing 2 13 workbench 2 13 delivery terms 6 2 dimensions and weights 2 2 dimensions of packed units 2 2 2 14 distilled water for cleaning 5 14 drip pan for fore vacuum pump 2 11 drip tray 2 9 dust 6 5 E electronic components 6 9 electrostatic discharge ESD damage 6 9 precautions 6 9 entrance requirements 2 2 exhaust port location 3 3 system 3 3 extern...

Page 67: ...nvironment 6 5 operator s responsibilities 1 1 2 1 3 1 4 1 5 1 6 3 6 4 6 8 oxygen 5 13 P packing materials 6 9 particulate matter air flow 6 5 dust 6 5 smoke 6 5 plasma exhaust 3 3 gas pressure regulator 5 7 polystyrene foam cups 6 9 power conditioning 6 7 6 8 monitoring 6 6 quality 4 4 6 5 sags and surges 6 5 slow average 6 5 supply quality 6 6 transients 6 5 power conditioner 4 2 power monitorin...

Page 68: ...tion 6 3 isolation noise 6 7 transient voltages 6 7 transport pallet 2 4 transportation risk 6 2 two stage gas pressure regulator 5 11 typographical conventions 1 2 U uninterruptible power supply UPS 6 7 USB cable 2 13 using your new instrument 6 3 V vibration 3 7 voltage disturbances 6 5 voltage sags 4 2 W wall outlet chiller 4 4 computer 4 4 instrument 4 2 weight 2 4 equipment 2 14 instrument 2 ...

Page 69: ...I 4 iCAP RQ Pre Installation Requirements Guide P N BRE0009927 Revision A Thermo Scientific Index W W ...

Page 70: ...s are installed and appropriate gas regulators are available List gases and purity _________________________________________________________________ 14 Yes No A hydrogen gas sensor is installed iCAP RQ 2 channel instruments 15 Yes No Is there is a suitable exhaust system present that is separate from solvent waste You must provide one exhaust system for the instrument heat exhaust and the plasma e...

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