START-UP
CAUTION
Extreme care is required to prevent breakage of profile TC or
profile TC connection on process tube.
4.8.3.1
Profile recipe selection
First, the desired profile temperatures need to be edited into the Profile Temperature Table.
a) Go to Certifications-submenu-Temperature Controller Certifications-submenu-
Profile Temperature Table on the
touchscreen
. Use Tube level – System – DTC
Setup – Profiling recipes for
TSC-2
. Put the desired profile temperatures in
ascending order. Do not forget to fill in for zones 4 and 5 if applicable.
b) Exit to the main menu by pressing Esc several times. Go to Recipe Menu (Recipe
for
TSC-2
) and edit the recipe PROFILE.
c) Find the steps with ‘Time 03:00:00’, ‘Temp. Profile Recipe xx’ and ‘Wait for Temp.
to reach setpoint’ commands and verify the correct temperatures. Adjust the recipe
by adding or deleting the appropriate steps if so required.
d) Store the recipe by exiting the Recipe Editor with Esc and confirm to store. Return
to Main Menu with Esc several times. Make sure to
Write to DTC
when using
TSC-2
.
e) Go to Tube Control Menu-submenu-Select a process recipe. Select the PROFILE
recipe. Use Operations for
TSC-2
.
4.8.4
Automatic profiling RUN
a. Select the PROFILE recipe.
b. Start the PROFILE recipe. Put the amount of wafers on the paddle that
approximates the process load.
c. Wait until the system has reached step 0 (STANDBY) again or indicates an operator
action is required.
d. Unload the wafers.
e. Unassign the Temperature Control Zones
f. Remove the Profile TC
CAUTION
Thermocouple is very hot!
g. The system is now ready for processing
F
URNACE
R
EFERENCE
M
ANUAL
4-12
