START-UP
General information:
•
Relative thermal expansion rates: SiC 4.8; Poly 3.8; Si
3
N
4
2.7;SiO
2
0.5
•
Typical cleaning frequency for Si
3
N
4
is every 100 cycles (based on 1000 Å per cycle
or 100,000 Å build up).
•
Typical cleaning frequency for Poly operations is every 40 cycles (based on 5000 Å
per cycle or 200,000 Å build up).
•
Typical cleaning frequency for LTO operations is every 10 cycles (based on 5000 Å
per cycle or 50,000 Å build up).
CAUTION
For Atmospheric Oxidation Processes it is
recommended to run a TCA-clean and oxidation
before starting processing.
3. In case of other material then quartz or Sic;
Please refer to "Vendors' cleaning-procedures".
4.8 Automatic profiling procedure
4.8.1
Automatic profiling procedure
This is a general automatic profiling run procedure, according to the Amtech/Tempress
standard. Automatic profiling defines the relation between the temperature inside the tube, as
measured by the
paddle ThermoCouples (TCs)
, the temperature outside the tube, as measured by
the
spike TCs,
and the required
power output.
Automatic profiling offers improved temperature
control and more accurate temperatures during process.
4.8.1.1
Introduction to profiling
The desired temperatures are defined in the Certifications-submenu-Temperature Controller
Certifications-submenu-Profile Temperature Table assuming a
touchscreen
is used. If the
TSC-2
software is used the profile temperature table can be found at Tube level – System
menu – DTC Setup – Profiling Recipes.
Four columns contain the
Profile Recipe PF
, the
Paddle Setpoint
, the
Spike value
and the
Output
power
. Every column is subdivided per temperature zone, every row corresponds to the
specific Profile Temperature Recipe.
After this relation has been established, the normal process run will use the
Paddle Setpoint
as
the final value to which the temperature must be controlled. It will use the Profile
Temperature Table to calculate the required
Spike Value
and this value will be used as the
control signal to the DTC software control loop. The
Power Output
is only used in case of a
F
URNACE
R
EFERENCE
M
ANUAL
4-8
