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Telemark TT-6, Instruction Manual

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Telemark TT-6 Power Supply 

GENERAL DESCRIPTION 

Functional Description 

The Telemark Model TT-6 Power supply is a direct current, regulated constant 

high voltage power supply.  It is intended for use in the optical coating field as well 

as for research applications. The TT-6 is operated from the control module. 
The TT-6 is compatible with EB sources that use electromagnetic deflection or 

combinations of electromagnetic deflection and permanent magnet focusing. 

Emission current regulated filament power is supplied to the EB sources. 

A system of safety interlocks with the vacuum system is provided to protect both 

the operator and the equipment. 

The Telemark electron-beam (EB) source power supply with XV Sweep with 

Memory Modules is a four mode of operation sweeper.  Front panel controls 

provide selection of the mode of operation of the sweeper:  position only, 

triangular, circular, or spiraling. 
Two sections of the front panel (can't be sweep control with module and/or sweep 

select module) can be used as mounted, or pulled out and used with extention on 

cables for mobile use. 

Do NOT attempt to carry the sweeper by the Removable 

Modules' handles, as the modules will unplug and 

the sweeper could fall. 

The sweep is needed for positioning and/or sweeping, i.e. moving the e-beam 

around the EB source's crucible pocket in a defined pattern.  The beam 

movement helps heat the crucible pocket's material more evenly.  Also, larger 

pockets can be used to allow more material in the vacuum chamber per 

evaporation run. 

GENERAL DESCRIPTION 

1-1 

Summary of Contents for TT-6

Page 1: ...AL Explanation of Symbols Lethal Voltages Present Refer to this manual for instructions Part Number 109 0101 2 Copyright TELEMARK 1994 1999 All rights reserved December 1999 www telemrk com Brand and product names are trademarks 01r registered trademarks of their respective companies ...

Page 2: ...rcuits unless absolutely necessary If it becomes necessary to test live circuits all test meter connections must be made with the power OFF Test leads should be in good repair and have sufficient insulation for a test voltage of at least twice that to be measured The test meters should be securely mounted and should not be touched after power is turned on Do not work in cramped spaces or cluttered...

Page 3: ...rn the malfunctioning module freight prepaid Telemark reserves the right to determine the appropriate warranty adjustment USER RESPONSIBILITY The user is responsible for proper installation operation and ordinary maintenance of the equipment following procedures described in this manual If the user has a doubt about use or installation of a component your Telemark representative or the factory sho...

Page 4: ...TION Functional Description System Components SPECIFICATIONS Main Cabinet Source Filament Transformer Optional XY Sweep with Memory Module INSTALLATION Introduction System Grounding Practice Vacuum Tank Ground Connections Main Cabinet Sweep Module Rear Panel Sweep Module Front Panel 1 1 1 2 2 1 2 2 2 2 3 1 3 1 3 2 3 3 3 5 3 6 3 9 ...

Page 5: ...r with Memory Module Optional 4 3 Sweep Select Module Memory Module Optional 4 5 Main Cabinet 4 6 OPERATION Introduction Preliminary Precautions Power Supply Startup XV Sweep with Memory Module Setup XV Sweep with Memory Module Operation Power Supply Shutdown 5 1 5 1 5 1 5 2 5 3 5 3 Telemark TT 6 Power Supply V ...

Page 6: ...pical Mounted Filament Transformer Con 3 3 3 C Main Cabinet Rear View 3 6 3 D Main Cabinet Connections 3 7 3 E VAC Input Terminal Block 3 8 3 F Sweep Module Rear View 3 8 3 G Sweep Module Connections 3 9 4 A Control Module Power Supply Front View 4 2 4 B Control Module Chassis Front View 4 3 4 C Sweep Module Front View 4 4 4 D Sweep Select Module Front View 4 5 4 E Main Cabinet Front View 4 7 ...

Page 7: ...ctron beam EB source power supply with XV Sweep with Memory Modules is a four mode of operation sweeper Front panel controls provide selection of the mode of operation of the sweeper position only triangular circular or spiraling Two sections of the front panel can t be sweep control with module and or sweep select module can be used as mounted or pulled out and used with extention on cables for m...

Page 8: ...s determined by the user after evaluating the interdependencies on the EB source of evaporation rate flux pattern and material System Components The TT 6 Electron Beam Power Supply consists one each of the following 1 Main Cabinet figure 1 A 2 Control Module Sweep Module figure 1 A or 1 8 3 Filament Transformer figure 1 C DEPTH 17 00 431 8 5 25 133 4 13 97 354 90 _______ 19 00 482 6 STANDARD SWEEP...

Page 9: ...EEEEEJ GJ 0 0 Optional 1 73143 9 t 3 50 88 8 PROGRAMMABLE SWEEP and 19 CONTROL 16 00 406 4 DEEP INCH mm 4 25 108 0 0 31 07 9 7 50 190 5 7 rf 5 00 127 0 1 5 00 127 0 7 25 184 2 TALL TT 6 FILAMENT TRANSFORMER 4x 0 31 07 9 6 00 152 4 1 5 00 r 7 0 67 j 25 6 4 11 00 279 4 9 00 228 6 TALL Optional TT 6 FILAMENT TRANSFORMER COVER Figure 1 C Filament Transformer GENERAL DESCRIPTION 1 3 ...

Page 10: ...ull load AC current TT 6 21 8A TT 6E 10 8A TT 6J 20 3 Regulation Less than 2 of max Ripple Less than 100 volts pk pk Factory set current cutback level 800 ma 7kV Current cutback response Less than 100 microseconds Output voltage range 6 5 to 7 5 kilovolts DC negative Output current maximum 750 ma 7kV Main Cabinet SPECIFICATIONS 2 1 ...

Page 11: ...ngitudinal and lateral plus or minus 1 5 amps mfg adjustable maximum into a load with impedance of less than 15Q Frequency range Triangle Pattern mode 6 to 50Hz Circle Spiral mode circling at 5Hz but can collapse into spiral at rates of 0 5 to 6Hz LED Bargraphs Lateral and Longitudinal LED bargraphs indicating amplitude position changes SWEEP SELECT MODULE Memory Module Four identical Output Modul...

Page 12: ...nstallation procedures are described below THE MAIN CABINET WEIGHS OVER 150 LBS IT MUST BE SET ON RAILS IN A 19 CABINET IT IS VERY HEAVY HANDLE WITH CARE System Grounding Practice See Figure 3 A and 3 B Vacuum Tank Grounding Installation A good ground is necessary to assure safe and proper operation of the power supply The following practices are recommended to assure a good ground NOTE THE POWER ...

Page 13: ...ore than 10 feet 3 meters but less than 20 feet 6 meters increase the size of the copper cable to 4 AWG For distances of 20 to 100 feet 6 to 30 5 meters use 2 to 4 inch 50 101 6mm by 035 050 inch 089 1 27mm copper strap For distances over 100 feet 30 5 meters use 4 to 6 inch 101 6 152 4mm by 035 050 inch 089 1 27mm copper strap Do not use braided wire Be sure that the connection is made to clean m...

Page 14: ... both for commands and feedback information in analog form This cable connects the power supply to the Control Module The Control Module is available in handheld or rack mounted Interlock Connections J102 The external interlocks are connected to the power supply through J102 which is located on the rear of the cabinet See Figure 3 0 Control Module Connections for details 22 AWG 0 34mm2 ribbon cabl...

Page 15: ...als are provided to indicate the operation of the power supply A positive signal 12 or 24 volts selected by J1O on mother board at pin 9 of J103 indicates that the power supply and filament controller is energized A signal at pin 7 is present when the power supply is in cutback because of an arc Pin 8 is a hard TTL low signal when HV Emission is engaged If the customer needs to use the remote inpu...

Page 16: ...ments Sweep Module Rear Panel See Figure 3 G INPUT V A C CONNECTION Power The VAC input connector on the back panel is a standard 115VAC 3 pin plastic domestic male computer style there is a choice of input cable for either standard outlet use or the 208V single phase jack on the back of a TT 3 6 power supply The 208VAC cable is provided with systems units This Sweep allows you to select the input...

Page 17: ...passing a minimum of two amperes Note the common return is not grounded inside the Sweep but must be grounded at the EB gun tank WARNING Leaving the common ungrounded at the tank could damage the Sweep TT 6 POWER SUPPLY CONNECTION J1 The interface between the Controller and the supply is the female 25 pin D sub The Controller connector allows Electron Beam Power Supply operation via the Sweeper s ...

Page 18: ...OI 0 C f VOLTAGE 0 cs C82 POWER 00 D 0 0 REMOTE PATTERN SELECTION CONNECTION J2 0 0 You may control the external selection of the Sweep Select Module s pattern banks This is accomplished through this male 9 pin D sub An indexer or computer may be used in conjunction with the Sweep Select Module to choose which of its four pattern banks is active Connect the indexer or computer interface to J2 such...

Page 19: ...ONTROL J4 JS The left module bay on the front of the chassis has 37 pin female D subs for the Controller Joystick Module The bottom connector allows the Module to plug straight in the top allows optional cable attachment to use the Module remotely The connectors are electrically identical but have different mounting hardware Uack bolts on the upper connector SWEEP SELECT CONTROL J6 J7 The right mo...

Page 20: ...interlocks are sequential That is the first open interlock in the string is indicated and when it is closed the next open interlock is indicated When all interlocks are closed all of the LEDs will be energized If Zero Start is not engaged no interlocks can light Note There is a jumper on the motherboard for REMOTE ON BYPASS that also requires a jumper at J3 pins 5 6 This 2nd jumper may be applied ...

Page 21: ... gauge must be present before high voltage can be energized 7 READY When all of the interlocks are closed this indicator will be energized The OFF push button LED will also energize at this time 8 VOLTAGE CURRENT METER A digital bar graph displays the output voltage and a digital display shows the emission current The voltage range of indication is O to 1O kV and the current is 0 to 999 ampere 9 E...

Page 22: ...Module 3 4 POSITION L E D s show the relative position of the beam in two axis Lateral left right and Longitudinal near far in the pocket 5 6 CONTROL CONNECTORS used to attach the Controller Module the bottom one allows the module to plug on the top is for attaching a remote cable Note the two connectors are electrically identical with different hardware 7 8 SWEEP SELECT CONNECTORS used similarly ...

Page 23: ...rds the center of the pattern With the MODE switch in the MANUAL beam position setting the Joystick is used to position the beam there is no sweeping With the MODE switch in the TRIANGLE setting the Lateral and Longitudinal Amplitudes and Frequencies of the beam are set with the corresponding knobs The Joystick is used to position the beam The resulting beam movement is in a diamond s pattern 2 JO...

Page 24: ...to the Controller Joystick Module 1 MANUAL AUTO SWITCH Changes the control of the Sweep Select module from the knob on the front panel 2 to the remote input from J2 on the back panel Note in AUTO mode if J2 has no input operation defaults to Sweep Select Channel 1 2 SELECT PATTERN Rotates to select the active pattern for manual mode 3 ACTIVE PATTERN L E D Indicates which one of the four patterns i...

Page 25: ...s pattern 5 6 POSITION Moves the beam in two axis Lateral left right and Longitudinal near far or the center position of patterns 7 8 AMPLITUDE Adjusts the overall pattern size in two axis 9 10 FREQUENCY Adjusts the sweeping speed s When in Triangle mode the Lateral and Longitudinal Frequency knobs operate independently in two axis When in Spiral mode only the Longitudinal Mod Freq pot 10 controls...

Page 26: ...mes 7 BIAS The Bias adjustment is located under the LEDs The Bias trim pot is recessed and is used to adjust the bias set point the minimum source current Turning clockwise with a small flat head screwdriver increases the filament current With the source current on and the emission current set at O the bias should be adjusted to the point that the beam just begins to appear Line voltage changes ma...

Page 27: ...System Grounding Practice 2 The external interlocks are correctly installed as described in detail in Chapter 3 Interlock Connections page 3 5 3 The vacuum tank is operational 4 The filament assembly is assembled to specifications and not shorted to ground and the E beam gun has material in its crucible Power Supply Startup 1 Turn on primaryAC POWER circuit breaker Note Allow two minutes for the u...

Page 28: ...XV Sweep with Memory Module Setup The following is the procedure to set the Sweep Module Controller Joystick Module for initializing operating levels This may be done with the Module plugged into the front panel or extended by cable 5 2 OPERATION 1 With the HV Emission off place the front panel switch control sweep select in the control position 2 Turn on the power switch 3 Set the joystick to its...

Page 29: ...erns are determined using the Controller Joystick Module while watching the E beam in the vacuum tank s EB gun crucible Once setup and positioned they can be copied to Sweep Select Module pattern bank channels even with Emission off visually match front panel LED bargraph display motions controlled by the joystick system with those controlled by the Sweep Select channels Once patterns are complete...

Page 30: ... Joystick Module Note also the Power Supply high v will be deactivated if the Controller Joystick Module is unplugged 3 Turn off the main circuit breaker 4 Turn off the Sweep s POWER switch The sweep outputs are deactivated 5 Turn off the primary source of 208 240 VAC power to the system 6 The system is now totally de energized ...

Page 31: ...RK r 1 I I MAIN POWER 380 415 v c I _ 50Hz 1 30 AMPS MAX I I I I I L TAP OUTPUT 1 5660V 2 4620V 3 3870V MAX I OUT 9D0ma SEE OUTPUT TABLE OUTPUT OUTPUT PCM ER AL 0 5VAC 25A HV 4KVDC 750ma 7 I I I I I I I I I I I I I I I m r1 r l l SCR CONTROL MAIN eca 120 0101 1 rev C REFERENCES 100X REM iASS ON o OFF J JJ 9 R SELECT mj R1 l12V _J __ CUl W K _J __ SCR BIAS _J __ VlH TAGE CON PWR HV CUT BACK AUTO FR...

Page 32: ...REMOTE OFF REMOTE ON r r r RED BLK WHT BLK ORN BLK ORN GRN BLK r I 24V o I I I I 390 I I I I J2 1 ZERO _________ E_M_IS_S_IO_N_Z_E_R_O ___ l E J MN r 1 START J2 9 10 J J 1 3 1 5K WATER E f I MN J2 1 a I J 1 4 J J DOORS E 1 Mf c r 1 J1 5 t8 J2 11 VACUUM CR7 _ i READY 1 11_ t S1 J I HV OFF LIGHT 2 2K I J1 7 OFF I I I I I I I I I I J3 6 HV CON 1 5K HV J 2 2K 1 J J l 7 J1 9 L 6 _____ L o __ Jl HV CON ...

Page 33: ...R1 CR9 I R1 R ___ _ _ i t I CR2 50t 50W I RS SOK OOW 20M 10W CR9 15V 1W I I I I I I I I I RED I STAND 1 OfF I ____ _J 7 I I I I I I I I I I I I I I I m tr r U t t l dJI SCR CONTROL MAIN PCB 120 0101 1 rev C I I I I I I I I I I J8 I 1 REFERENCES 100X REMOl J BYPASS ONmOFF JJ 9 J mR SEL Cf 24Y 11 _J _ SCR BIAS _J _ VOLTAGE CON PWR HY CUT SIC 1 PANF1 CONl1iOl 5 8 10 11 12 13 14 10 18 17 7 1 HANDHELD ...

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