Section 7: Make C-V measurements on a MOSCAP
Model 4200A-SCS Parameter Analyzer User's Manual
7-10
4200A-900-01 Rev. C / January 2019
In this test, the CVH1 terminals are internally connected to the AC ammeter and the HI of the DC
voltage source by default. The CVH1 terminals are externally connected to the gate of the MOS
capacitor. The CVL1 terminals are internally connected to the AC voltage source and the LO of the
DC voltage source and are externally connected to the bulk of the MOS capacitor or to the prober
chuck.
Perform offset compensation
C-V measurements on a MOS capacitor are generally performed on a wafer using a prober. The
4210-CVU is connected to the MOS capacitor through cables, adapters, and a prober. Cabling adds
stray capacitance to measurements.
To correct for the stray capacitance, Clarius has tools for offset correction. Correction is a two-part
process: You perform the corrections for open, and then you enable the corrections in the Terminal
Settings pane.
Open compensation is generally used for high impedance measurements (<10 pF or >1
MΩ). A short
compensation correction is generally used for low impedance measurements (>10 nF or <10
Ω). For
a short compensation, you select Measure Short, and then short the probe to the chuck.
To perform the corrections:
1. Select
Tools
.
Figure 95: Tools icon in Clarius
