
OPERATION
OF
THE
MJB4
32
MJB4 - Operation Rev02 01-06
3
3.6.2. Transmitted Light
3.6.2.1. Setting the Exposure Values
See section 1.3.3. "Setting Exposure Values".
3.6.2.2. Loading the Mask
See section 1.3.5. "Loading the Mask".
WARNING:
In order for all the processes to start,
the MAIN MENU must be selected and
the contact lever must be pressed!
3.6.2.3. Adjusting the Microscope with
IR Lighting
Setting the TSA Microscope
The split-field switch must be set to the middle
position for the M604 microscope and the lever for
the IR camera opening must be in the IR position.
Focusing the Mask Level
Coarse focusing is possible using the TSA Z motion
located behind the TSA microscope.
Set the fine focusing on the M604 microscope
separately. To do so, use the OBJECTIVE FOCUS
FINE MANUAL knob on the microscope.
Setting the TSA Microscope to the Mask Adjust-
ing Crosses
The right/left microscope is set to the right/left mask
adjusting crosses using OBJECTIVE X-
SEPARATION.
Unloading the Mask
To release the mask holder, remove both screws on
the right side of the mask holder frame. Take out the
mask holder and place it on a tray upside down.
Switch off the mask vacuum by pressing the
MASKVACUUM IS ON button.
The mask can now be removed.
IR Lighting Setting
The SETTINGS MENU must be selected in the
display and the lighting must be set to INFRARED
MICROSCOPE. The IR lighting arms are now set
precisely under the lenses.
Set the brightness using the left/right potentiometers
on the left front plate.
The left and right aperture diaphragms on the
microscope allow you to set the lighting on the left
and right separately.
Loading and Clamping the Mask Holder
With the top side facing up, the mask holder is
pushed into the adjusting station and then fasten in
the mask holder frame using the knurled screws.
3.6.2.4. Loading the Substrate
See section 1.3.6. "Loading the Substrate".
Press this button to display a description of the
individual procedure steps including the substrate
adjustment.
– Load the mask holder with mask,
– Pull out the slide and load the chuck,
– Place the substrate on the chuck,
– Insert the slide completely,
– Raise the substrate with the contact lever (WEC).
Caution!
The microscope pivots downward!
Setting the separation lever to the adjusting po-
sition
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Experienced operators can use the contact lever
without first selecting the LOAD SUBSTRATE
button.
Summary of Contents for MJB4
Page 1: ...MJB4 Manual High End Mask Aligner Rev 02 01 06 www suss com Mask Aligners USER MANUAL...
Page 2: ......
Page 6: ...CONTENTS IV MJB4 Contents Rev02 01 06 i...
Page 8: ...MJB4 Foreword Rev02 01 06 F b...
Page 10: ...MJB4 Attention Rev02 01 06 d...
Page 16: ...WARNINGS AND SAFETY PRECAUTIONS 6 MJB4 Warnings and Safety Rev02 01 06 1...
Page 24: ...INSTALLATION AND TRANSPORT 14 MJB4 Installation and Transport Rev02 01 06 2...
Page 48: ...OPERATION OF THE MJB4 38 MJB4 Operation Rev02 01 06 3...
Page 51: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 41 4...
Page 57: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 47 4...
Page 64: ...APPENDIX MJB4 54 Appendix MJB4 E Rev02 01 06 4...
Page 65: ...MJB4 Appendix Rev 02 01 06 55 APPENDIX 4 191930 Pneumatic Plan Sheet 1 of 4...
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Page 67: ...MJB4 Appendix Rev 02 01 06 57 APPENDIX 4 191930 Pneumatic Plan Sheet 2 of 4...
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Page 69: ...MJB4 Appendix Rev 02 01 06 59 APPENDIX 4 191930 Pneumatic Plan Sheet 3 of 4...
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Page 71: ...MJB4 Appendix Rev 02 01 06 61 APPENDIX 4 191930 Pneumatic Plan Sheet 4 of 4...
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Page 75: ...MJB4 Electronics Schematics Rev 02 01 06 65 4 APPENDIX Wire list Rev 06 Sheet 1 of 7...
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Page 77: ...MJB4 Electronics Schematics Rev 02 01 06 67 4 APPENDIX Wire list Rev 06 Sheet 2 of 7...
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Page 79: ...MJB4 Electronics Schematics Rev 02 01 06 69 4 APPENDIX Wire list Rev 06 Sheet 3 of 7...
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Page 81: ...MJB4 Electronics Schematics Rev 02 01 06 71 4 APPENDIX Wire list Rev 06 Sheet 4 of 7...
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Page 83: ...MJB4 Electronics Schematics Rev 02 01 06 73 4 APPENDIX Wire list Rev 06 Sheet 5 of 7...
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Page 85: ...MJB4 Electronics Schematics Rev 02 01 06 75 4 APPENDIX Wire list Rev 06 Sheet 6 of 7...
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Page 87: ...MJB4 Electronics Schematics Rev 02 01 06 77 4 APPENDIX Wire list Rev 06 Sheet 7 of 7...
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Page 89: ...MJB4 Electronics Schematics Rev 02 01 06 79 4 APPENDIX Overview of cables...
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Page 91: ...MJB4 Electronics Schematics Rev 02 01 06 81 4 APPENDIX 189872 Cable W1 Unit U1 SPS OD232...
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Page 93: ...MJB4 Electronics Schematics Rev 02 01 06 83 4 APPENDIX 189873 Cable W2 Pneumatic I...
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Page 95: ...MJB4 Electronics Schematics Rev 02 01 06 85 4 APPENDIX 189874 Cable W3 Pneumatic II...
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Page 97: ...MJB4 Electronics Schematics Rev 02 01 06 87 4 APPENDIX 189902 Cable W4 Unit U1 VCC PLC...
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Page 99: ...MJB4 Electronics Schematics Rev 02 01 06 89 4 APPENDIX 189876 Cable W5 Unit U1 PLC ID211...
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Page 101: ...MJB4 Electronics Schematics Rev 02 01 06 91 4 APPENDIX 189877 Cable W6 Unit U1 PLC AD081...
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Page 105: ...MJB4 Electronics Schematics Rev 02 01 06 95 4 APPENDIX 189898 Cable W8 VCC Unit U1...
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Page 107: ...MJB4 Electronics Schematics Rev 02 01 06 97 4 APPENDIX 189875 Cable W9 Signals X2 U1...
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Page 109: ...MJB4 Electronics Schematics Rev 02 01 06 99 4 APPENDIX 189900 Cable W10 VCC Touchscreen...
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Page 117: ...MJB4 Electronics Schematics Rev 02 01 06 107 4 APPENDIX 191981 Cable W13 Sensor 1 1C1...
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Page 119: ...MJB4 Electronics Schematics Rev 02 01 06 109 4 APPENDIX 191982 Cable W14 Sensor 1 3C1...
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Page 121: ...MJB4 Electronics Schematics Rev 02 01 06 111 4 APPENDIX 191983 Cable W15 Sensor 00C3...
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Page 123: ...MJB4 Electronics Schematics Rev 02 01 06 113 4 APPENDIX 191984 Cable W16 Sensor 00C1...
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Page 125: ...MJB4 Electronics Schematics Rev 02 01 06 115 4 APPENDIX 191985 Cable W17 Sensor 00C2...
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Page 127: ...MJB4 Electronics Schematics Rev 02 01 06 117 4 APPENDIX 191986 Cable W18 Sensor 9 C1...
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Page 129: ...MJB4 Electronics Schematics Rev 02 01 06 119 4 APPENDIX 189907 Cable W19 PLC SCU41 CIC1200...
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Page 131: ...MJB4 Electronics Schematics Rev 02 01 06 121 4 APPENDIX 189878 Cable W20 Elektronic ON key 2S2...
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Page 135: ...MJB4 Electronics Schematics Rev 02 01 06 125 4 APPENDIX 189906 Cable W22 Touchscreen Port A...
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Page 137: ...MJB4 Electronics Schematics Rev 02 01 06 127 4 APPENDIX 188501 Cable W23 Unit U2 Unit U1...
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Page 139: ...MJB4 Electronics Schematics Rev 02 01 06 129 4 APPENDIX 190053 Cable W24 Unit U3 Unit U1...
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Page 141: ...MJB4 Electronics Schematics Rev 02 01 06 131 4 APPENDIX 189826 Power supply...
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Page 143: ...MJB4 Electronics Schematics Rev 02 01 06 133 4 APPENDIX 190672 PLC...
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Page 145: ...MJB4 Electronics Schematics Rev 02 01 06 135 4 APPENDIX 190674 Sensors manipulator...
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Page 149: ...MJB4 Electronics Schematics Rev 02 01 06 139 4 APPENDIX 190673 Sensors lamp house...
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Page 157: ...MJB4 Electronics Schematics Rev 02 01 06 147 4 APPENDIX 189489 Layout distributorplate MJB4...
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Page 159: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 149 4 4 8 International Chemical Safety Cards Mercury...
Page 160: ...APPENDIX MJB4 150 MJB4 Appendix Rev02 01 06 4...
Page 161: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 151 4...
Page 162: ...APPENDIX MJB4 152 MJB4 Appendix Rev02 01 06 4 4 9 Lock Out Tag Out Checklist...
Page 163: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 153 4...