
WARNINGS
AND
SAFETY
PRECAUTIONS
2
MJB4 - Warnings and Safety Rev02 01-06
1
To begin operating the machine again, the main
switch must be turned to ON and the machine must
be restarted.
1.5. Dangers
1.5.1. Physical Dangers
Moving machine parts such as the alignment station,
microscopes and their manipulators, the mirror
housing and others can cause injury to the operator.
You should take particular care of the movements of
the microscscope if your machine is equipped with
the direct microscope viewfinder.
Moving machine parts can injure the
fingers or face.
Do not remove any materials from the
machine until all machine movements
have stopped!
With a machine equipped with a vibra-
tion-damped underframe, the base
plate can sink without warning in the
event of a drop in pressure in the com-
pressed air supply.
Never place the hands between the
base plate and the vibration-damped
underframe of the machine!
The movement of a direct viewfinder
can cause injury to the eyes or face.
Stop looking into the microscope view-
finder before you start the microscope
movement!
A particular danger results from the
fragments thrown out in the event of a
lamp explosion!
Situations which can lead to a lamp ex-
plosion are described in a separate
section.
You should also be aware of the risk of
poisoning with Hg following a lamp ex-
plosion; this is also described in a sep-
arate section.
1.5.2. Thermal Dangers
The upper side of the lamp house gets very hot dur-
ing operation.
Operating temperatures of several hundred °C occur
on the lamp itself.
The lamp cooling must be correctly adjusted accord-
ing to the lamp type!
There is a risk of lamp explosion if the
lamp house is opened prematurely
while the lamp is hot.
The exposure lamp has to cool down
for at least 20 minutes before the lamp
house door is opened!
The controlled cooling required for
more powerful lamp types must also be
left in operation during the cooling
phase!
1.5.3. Electrical Dangers
Live parts may be exposed when the machine cover
is removed.
High wattages and currents of up to 50 A can occur
in the lamp and lamp power supply.
The lamp starting voltage can be up to 30 kV.
Do not open the machine until the
whole machine has been isolated from
the power supply!
Pay attention to this warning symbol on
covers!
Where applicable, observe local "log
out - tag out" regulations!
The individual electrical assemblies, especially bal-
lasts CIC1200, CPC200 and CPC350, contain no
parts which the user could repair or adjust.
1.5.4. Radiation Danger
The high luminous density of the exposure lamp can
cause eye damage.
In particular, the
invisible ultraviolet
component of the
light can lead to permanent eye damage or skin
burns.
UV light can acutely or permanently
damage your eyes.
Covers over the ray path may not be re-
moved while the UV lamp is switched
on!
Lamp adjustment work may only be
carried out with UV-protective goggles
- also with skin protection in the case of
intensive radiation!
Summary of Contents for MJB4
Page 1: ...MJB4 Manual High End Mask Aligner Rev 02 01 06 www suss com Mask Aligners USER MANUAL...
Page 2: ......
Page 6: ...CONTENTS IV MJB4 Contents Rev02 01 06 i...
Page 8: ...MJB4 Foreword Rev02 01 06 F b...
Page 10: ...MJB4 Attention Rev02 01 06 d...
Page 16: ...WARNINGS AND SAFETY PRECAUTIONS 6 MJB4 Warnings and Safety Rev02 01 06 1...
Page 24: ...INSTALLATION AND TRANSPORT 14 MJB4 Installation and Transport Rev02 01 06 2...
Page 48: ...OPERATION OF THE MJB4 38 MJB4 Operation Rev02 01 06 3...
Page 51: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 41 4...
Page 57: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 47 4...
Page 64: ...APPENDIX MJB4 54 Appendix MJB4 E Rev02 01 06 4...
Page 65: ...MJB4 Appendix Rev 02 01 06 55 APPENDIX 4 191930 Pneumatic Plan Sheet 1 of 4...
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Page 67: ...MJB4 Appendix Rev 02 01 06 57 APPENDIX 4 191930 Pneumatic Plan Sheet 2 of 4...
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Page 69: ...MJB4 Appendix Rev 02 01 06 59 APPENDIX 4 191930 Pneumatic Plan Sheet 3 of 4...
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Page 71: ...MJB4 Appendix Rev 02 01 06 61 APPENDIX 4 191930 Pneumatic Plan Sheet 4 of 4...
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Page 75: ...MJB4 Electronics Schematics Rev 02 01 06 65 4 APPENDIX Wire list Rev 06 Sheet 1 of 7...
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Page 77: ...MJB4 Electronics Schematics Rev 02 01 06 67 4 APPENDIX Wire list Rev 06 Sheet 2 of 7...
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Page 87: ...MJB4 Electronics Schematics Rev 02 01 06 77 4 APPENDIX Wire list Rev 06 Sheet 7 of 7...
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Page 89: ...MJB4 Electronics Schematics Rev 02 01 06 79 4 APPENDIX Overview of cables...
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Page 91: ...MJB4 Electronics Schematics Rev 02 01 06 81 4 APPENDIX 189872 Cable W1 Unit U1 SPS OD232...
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Page 93: ...MJB4 Electronics Schematics Rev 02 01 06 83 4 APPENDIX 189873 Cable W2 Pneumatic I...
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Page 95: ...MJB4 Electronics Schematics Rev 02 01 06 85 4 APPENDIX 189874 Cable W3 Pneumatic II...
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Page 97: ...MJB4 Electronics Schematics Rev 02 01 06 87 4 APPENDIX 189902 Cable W4 Unit U1 VCC PLC...
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Page 99: ...MJB4 Electronics Schematics Rev 02 01 06 89 4 APPENDIX 189876 Cable W5 Unit U1 PLC ID211...
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Page 101: ...MJB4 Electronics Schematics Rev 02 01 06 91 4 APPENDIX 189877 Cable W6 Unit U1 PLC AD081...
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Page 105: ...MJB4 Electronics Schematics Rev 02 01 06 95 4 APPENDIX 189898 Cable W8 VCC Unit U1...
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Page 107: ...MJB4 Electronics Schematics Rev 02 01 06 97 4 APPENDIX 189875 Cable W9 Signals X2 U1...
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Page 109: ...MJB4 Electronics Schematics Rev 02 01 06 99 4 APPENDIX 189900 Cable W10 VCC Touchscreen...
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Page 117: ...MJB4 Electronics Schematics Rev 02 01 06 107 4 APPENDIX 191981 Cable W13 Sensor 1 1C1...
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Page 119: ...MJB4 Electronics Schematics Rev 02 01 06 109 4 APPENDIX 191982 Cable W14 Sensor 1 3C1...
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Page 121: ...MJB4 Electronics Schematics Rev 02 01 06 111 4 APPENDIX 191983 Cable W15 Sensor 00C3...
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Page 123: ...MJB4 Electronics Schematics Rev 02 01 06 113 4 APPENDIX 191984 Cable W16 Sensor 00C1...
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Page 125: ...MJB4 Electronics Schematics Rev 02 01 06 115 4 APPENDIX 191985 Cable W17 Sensor 00C2...
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Page 127: ...MJB4 Electronics Schematics Rev 02 01 06 117 4 APPENDIX 191986 Cable W18 Sensor 9 C1...
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Page 129: ...MJB4 Electronics Schematics Rev 02 01 06 119 4 APPENDIX 189907 Cable W19 PLC SCU41 CIC1200...
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Page 131: ...MJB4 Electronics Schematics Rev 02 01 06 121 4 APPENDIX 189878 Cable W20 Elektronic ON key 2S2...
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Page 135: ...MJB4 Electronics Schematics Rev 02 01 06 125 4 APPENDIX 189906 Cable W22 Touchscreen Port A...
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Page 137: ...MJB4 Electronics Schematics Rev 02 01 06 127 4 APPENDIX 188501 Cable W23 Unit U2 Unit U1...
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Page 139: ...MJB4 Electronics Schematics Rev 02 01 06 129 4 APPENDIX 190053 Cable W24 Unit U3 Unit U1...
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Page 141: ...MJB4 Electronics Schematics Rev 02 01 06 131 4 APPENDIX 189826 Power supply...
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Page 143: ...MJB4 Electronics Schematics Rev 02 01 06 133 4 APPENDIX 190672 PLC...
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Page 145: ...MJB4 Electronics Schematics Rev 02 01 06 135 4 APPENDIX 190674 Sensors manipulator...
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Page 149: ...MJB4 Electronics Schematics Rev 02 01 06 139 4 APPENDIX 190673 Sensors lamp house...
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Page 157: ...MJB4 Electronics Schematics Rev 02 01 06 147 4 APPENDIX 189489 Layout distributorplate MJB4...
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Page 159: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 149 4 4 8 International Chemical Safety Cards Mercury...
Page 160: ...APPENDIX MJB4 150 MJB4 Appendix Rev02 01 06 4...
Page 161: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 151 4...
Page 162: ...APPENDIX MJB4 152 MJB4 Appendix Rev02 01 06 4 4 9 Lock Out Tag Out Checklist...
Page 163: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 153 4...