
INSTALLATION
AND
TRANSPORT
8
MJB4 - Installation and Transport Rev02 01-06
2
Power Data
:
Specifications for Qutomatic Circuit Breakers:
Supply Media
:
The machine has connections for pneumatic hoses
with a 6mm outer diameter or connections for pneu-
matic hoses with a 1/4 inch outer diameter. Hose
couplings for supply media connections are not in-
cluded.
Standard with
CPC200:
300 VA ; 230 V AC ±10% ;
50/60 Hz
Standard with
CPC350:
500 VA ; 230 V AC ±10% ;
50/60 Hz
Standard with
CIC1200:
1200 VA ; 230 V AC ±10% ;
50/60 Hz
Power overview:
CPC200 = 300 VA
CPC350 = 500 VA
CIC1200 = 1200 VA
Machine = 250 VA
Ext. power =250 VA (standard)
Max. connected load = 16 A
Power cord:
grounded 3-wire cable;
3.0 m
V(AC) input
1
1. The CIC1200 only works with 230 V (AC) current
100-240
F1(A) CPC200
4
F2(A) electronics
2
F3(A)
7.5
Nitrogen:
ca. 1.5bar, 30 - 45 psi;
Consumption:
Depends on lamp model; see
the table ”Settings for lamp
cooling and lamp housing
extraction” in section 1.1.
"Prerequisites for Installation".
! Warning !
Use dry nitrogen only
Vacuum:
-0.8 bar manometer reading
(equals 0.2 bar absolute)
Compressed air:
Without base:
ca. 5.5 bar, 75 psi
With base:
ca. 7.0 bar, 105 psi
Consumption:
ca. 1.0 m
3
/h, 35 scf/h
! Warning !
Water, oil and dust particles
must be removed from the
compressed air supply
system.
Table 1:
Settings for lamp cooling and lamp housing extraction
Notes
Exposure lamp
[W]
200
Osram
350
Osram
350
Ushio
500
Ushio
Nitrogen
Main pressure
[bar]
1.5
1.5
1.5
1.5
Nitrogen lower lamp
base
[l/h]
180
180
120
80
Must be set by
service technician
Nitrogen upper lamp
base
[l/h]
-
-
-
200
Must be set by
service technician
Nitrogen
Shutter
[l/h]
260
260
260
260
Must be set by
service technician
Diameter
Extraction
[mm]
-
-
-
100
Summary of Contents for MJB4
Page 1: ...MJB4 Manual High End Mask Aligner Rev 02 01 06 www suss com Mask Aligners USER MANUAL...
Page 2: ......
Page 6: ...CONTENTS IV MJB4 Contents Rev02 01 06 i...
Page 8: ...MJB4 Foreword Rev02 01 06 F b...
Page 10: ...MJB4 Attention Rev02 01 06 d...
Page 16: ...WARNINGS AND SAFETY PRECAUTIONS 6 MJB4 Warnings and Safety Rev02 01 06 1...
Page 24: ...INSTALLATION AND TRANSPORT 14 MJB4 Installation and Transport Rev02 01 06 2...
Page 48: ...OPERATION OF THE MJB4 38 MJB4 Operation Rev02 01 06 3...
Page 51: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 41 4...
Page 57: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 47 4...
Page 64: ...APPENDIX MJB4 54 Appendix MJB4 E Rev02 01 06 4...
Page 65: ...MJB4 Appendix Rev 02 01 06 55 APPENDIX 4 191930 Pneumatic Plan Sheet 1 of 4...
Page 66: ......
Page 67: ...MJB4 Appendix Rev 02 01 06 57 APPENDIX 4 191930 Pneumatic Plan Sheet 2 of 4...
Page 68: ......
Page 69: ...MJB4 Appendix Rev 02 01 06 59 APPENDIX 4 191930 Pneumatic Plan Sheet 3 of 4...
Page 70: ......
Page 71: ...MJB4 Appendix Rev 02 01 06 61 APPENDIX 4 191930 Pneumatic Plan Sheet 4 of 4...
Page 72: ......
Page 75: ...MJB4 Electronics Schematics Rev 02 01 06 65 4 APPENDIX Wire list Rev 06 Sheet 1 of 7...
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Page 77: ...MJB4 Electronics Schematics Rev 02 01 06 67 4 APPENDIX Wire list Rev 06 Sheet 2 of 7...
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Page 79: ...MJB4 Electronics Schematics Rev 02 01 06 69 4 APPENDIX Wire list Rev 06 Sheet 3 of 7...
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Page 81: ...MJB4 Electronics Schematics Rev 02 01 06 71 4 APPENDIX Wire list Rev 06 Sheet 4 of 7...
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Page 83: ...MJB4 Electronics Schematics Rev 02 01 06 73 4 APPENDIX Wire list Rev 06 Sheet 5 of 7...
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Page 85: ...MJB4 Electronics Schematics Rev 02 01 06 75 4 APPENDIX Wire list Rev 06 Sheet 6 of 7...
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Page 87: ...MJB4 Electronics Schematics Rev 02 01 06 77 4 APPENDIX Wire list Rev 06 Sheet 7 of 7...
Page 88: ......
Page 89: ...MJB4 Electronics Schematics Rev 02 01 06 79 4 APPENDIX Overview of cables...
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Page 91: ...MJB4 Electronics Schematics Rev 02 01 06 81 4 APPENDIX 189872 Cable W1 Unit U1 SPS OD232...
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Page 93: ...MJB4 Electronics Schematics Rev 02 01 06 83 4 APPENDIX 189873 Cable W2 Pneumatic I...
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Page 95: ...MJB4 Electronics Schematics Rev 02 01 06 85 4 APPENDIX 189874 Cable W3 Pneumatic II...
Page 96: ......
Page 97: ...MJB4 Electronics Schematics Rev 02 01 06 87 4 APPENDIX 189902 Cable W4 Unit U1 VCC PLC...
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Page 99: ...MJB4 Electronics Schematics Rev 02 01 06 89 4 APPENDIX 189876 Cable W5 Unit U1 PLC ID211...
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Page 101: ...MJB4 Electronics Schematics Rev 02 01 06 91 4 APPENDIX 189877 Cable W6 Unit U1 PLC AD081...
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Page 105: ...MJB4 Electronics Schematics Rev 02 01 06 95 4 APPENDIX 189898 Cable W8 VCC Unit U1...
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Page 107: ...MJB4 Electronics Schematics Rev 02 01 06 97 4 APPENDIX 189875 Cable W9 Signals X2 U1...
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Page 109: ...MJB4 Electronics Schematics Rev 02 01 06 99 4 APPENDIX 189900 Cable W10 VCC Touchscreen...
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Page 117: ...MJB4 Electronics Schematics Rev 02 01 06 107 4 APPENDIX 191981 Cable W13 Sensor 1 1C1...
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Page 119: ...MJB4 Electronics Schematics Rev 02 01 06 109 4 APPENDIX 191982 Cable W14 Sensor 1 3C1...
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Page 121: ...MJB4 Electronics Schematics Rev 02 01 06 111 4 APPENDIX 191983 Cable W15 Sensor 00C3...
Page 122: ......
Page 123: ...MJB4 Electronics Schematics Rev 02 01 06 113 4 APPENDIX 191984 Cable W16 Sensor 00C1...
Page 124: ......
Page 125: ...MJB4 Electronics Schematics Rev 02 01 06 115 4 APPENDIX 191985 Cable W17 Sensor 00C2...
Page 126: ......
Page 127: ...MJB4 Electronics Schematics Rev 02 01 06 117 4 APPENDIX 191986 Cable W18 Sensor 9 C1...
Page 128: ......
Page 129: ...MJB4 Electronics Schematics Rev 02 01 06 119 4 APPENDIX 189907 Cable W19 PLC SCU41 CIC1200...
Page 130: ......
Page 131: ...MJB4 Electronics Schematics Rev 02 01 06 121 4 APPENDIX 189878 Cable W20 Elektronic ON key 2S2...
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Page 135: ...MJB4 Electronics Schematics Rev 02 01 06 125 4 APPENDIX 189906 Cable W22 Touchscreen Port A...
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Page 137: ...MJB4 Electronics Schematics Rev 02 01 06 127 4 APPENDIX 188501 Cable W23 Unit U2 Unit U1...
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Page 139: ...MJB4 Electronics Schematics Rev 02 01 06 129 4 APPENDIX 190053 Cable W24 Unit U3 Unit U1...
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Page 141: ...MJB4 Electronics Schematics Rev 02 01 06 131 4 APPENDIX 189826 Power supply...
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Page 143: ...MJB4 Electronics Schematics Rev 02 01 06 133 4 APPENDIX 190672 PLC...
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Page 145: ...MJB4 Electronics Schematics Rev 02 01 06 135 4 APPENDIX 190674 Sensors manipulator...
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Page 149: ...MJB4 Electronics Schematics Rev 02 01 06 139 4 APPENDIX 190673 Sensors lamp house...
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Page 157: ...MJB4 Electronics Schematics Rev 02 01 06 147 4 APPENDIX 189489 Layout distributorplate MJB4...
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Page 159: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 149 4 4 8 International Chemical Safety Cards Mercury...
Page 160: ...APPENDIX MJB4 150 MJB4 Appendix Rev02 01 06 4...
Page 161: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 151 4...
Page 162: ...APPENDIX MJB4 152 MJB4 Appendix Rev02 01 06 4 4 9 Lock Out Tag Out Checklist...
Page 163: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 153 4...