
INSTALLATION
AND
TRANSPORT
MJB4 - Installation and Transport Rev02 01-06
7
2
2. I
NSTALLATION
AND
T
RANSPORT
Containers must be opened and the machine must
be transported and installed by a SUSS MicroTec
service technician or person authorized by SUSS
MicroTec.
Users who open containers with system compo-
nents or install or transport the machine without a
SUSS MicroTec technician or a person authorized
by SUSS MicroTec
do so at their own risk
.
Power connections and supply connections (com-
pressed air, nitrogen, etc.) at the installation site
must be completely installed by the customer before
installation so the machine can be connected.
2.1. Prerequisites for Installa-
tion
The following installation prerequisites must be met
before the machine can be operated optimally:
2.1.1. Ambient Requirements
•
The machine must be installed on a vibration-free
surface since vibrations can negatively influence
the machine’s function.
--> We recommend setting up the machine on a
SUSS MicroTec vibration-insulated base
frame intended for this purpose.
•
The machine must be installed in a clean room.
Impurities in the air have negative effect on the
machine’s function.
--> We recommend clean room class 1000 or
better.
•
The room temperature and relative humidity
should be controlled at the setup site.
--> We recommend a room temperature
between 20°C (68°F) and 22°C (72°F) and a
relative humidity between 45 and 55% (not
condensing).
•
The back of the machine must be at least 10 cm
(4 in) away from the room wall. See the figure “Di-
mensions of the MJB4 Mask Aligner:” for the ex-
act dimensions of the aligner.
--> We recommend a distance of 30cm (12in).
Dimensions of the MJB4 Mask Aligner:
Width:
603 mm
Depth:
808 mm
Height:
658 mm
1400 mm (with base)
Weight:
approx. 150 kg MJB4
160 kg base
Summary of Contents for MJB4
Page 1: ...MJB4 Manual High End Mask Aligner Rev 02 01 06 www suss com Mask Aligners USER MANUAL...
Page 2: ......
Page 6: ...CONTENTS IV MJB4 Contents Rev02 01 06 i...
Page 8: ...MJB4 Foreword Rev02 01 06 F b...
Page 10: ...MJB4 Attention Rev02 01 06 d...
Page 16: ...WARNINGS AND SAFETY PRECAUTIONS 6 MJB4 Warnings and Safety Rev02 01 06 1...
Page 24: ...INSTALLATION AND TRANSPORT 14 MJB4 Installation and Transport Rev02 01 06 2...
Page 48: ...OPERATION OF THE MJB4 38 MJB4 Operation Rev02 01 06 3...
Page 51: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 41 4...
Page 57: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 47 4...
Page 64: ...APPENDIX MJB4 54 Appendix MJB4 E Rev02 01 06 4...
Page 65: ...MJB4 Appendix Rev 02 01 06 55 APPENDIX 4 191930 Pneumatic Plan Sheet 1 of 4...
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Page 67: ...MJB4 Appendix Rev 02 01 06 57 APPENDIX 4 191930 Pneumatic Plan Sheet 2 of 4...
Page 68: ......
Page 69: ...MJB4 Appendix Rev 02 01 06 59 APPENDIX 4 191930 Pneumatic Plan Sheet 3 of 4...
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Page 71: ...MJB4 Appendix Rev 02 01 06 61 APPENDIX 4 191930 Pneumatic Plan Sheet 4 of 4...
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Page 75: ...MJB4 Electronics Schematics Rev 02 01 06 65 4 APPENDIX Wire list Rev 06 Sheet 1 of 7...
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Page 77: ...MJB4 Electronics Schematics Rev 02 01 06 67 4 APPENDIX Wire list Rev 06 Sheet 2 of 7...
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Page 79: ...MJB4 Electronics Schematics Rev 02 01 06 69 4 APPENDIX Wire list Rev 06 Sheet 3 of 7...
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Page 81: ...MJB4 Electronics Schematics Rev 02 01 06 71 4 APPENDIX Wire list Rev 06 Sheet 4 of 7...
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Page 83: ...MJB4 Electronics Schematics Rev 02 01 06 73 4 APPENDIX Wire list Rev 06 Sheet 5 of 7...
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Page 85: ...MJB4 Electronics Schematics Rev 02 01 06 75 4 APPENDIX Wire list Rev 06 Sheet 6 of 7...
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Page 87: ...MJB4 Electronics Schematics Rev 02 01 06 77 4 APPENDIX Wire list Rev 06 Sheet 7 of 7...
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Page 89: ...MJB4 Electronics Schematics Rev 02 01 06 79 4 APPENDIX Overview of cables...
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Page 91: ...MJB4 Electronics Schematics Rev 02 01 06 81 4 APPENDIX 189872 Cable W1 Unit U1 SPS OD232...
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Page 93: ...MJB4 Electronics Schematics Rev 02 01 06 83 4 APPENDIX 189873 Cable W2 Pneumatic I...
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Page 95: ...MJB4 Electronics Schematics Rev 02 01 06 85 4 APPENDIX 189874 Cable W3 Pneumatic II...
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Page 97: ...MJB4 Electronics Schematics Rev 02 01 06 87 4 APPENDIX 189902 Cable W4 Unit U1 VCC PLC...
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Page 99: ...MJB4 Electronics Schematics Rev 02 01 06 89 4 APPENDIX 189876 Cable W5 Unit U1 PLC ID211...
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Page 101: ...MJB4 Electronics Schematics Rev 02 01 06 91 4 APPENDIX 189877 Cable W6 Unit U1 PLC AD081...
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Page 105: ...MJB4 Electronics Schematics Rev 02 01 06 95 4 APPENDIX 189898 Cable W8 VCC Unit U1...
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Page 107: ...MJB4 Electronics Schematics Rev 02 01 06 97 4 APPENDIX 189875 Cable W9 Signals X2 U1...
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Page 109: ...MJB4 Electronics Schematics Rev 02 01 06 99 4 APPENDIX 189900 Cable W10 VCC Touchscreen...
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Page 117: ...MJB4 Electronics Schematics Rev 02 01 06 107 4 APPENDIX 191981 Cable W13 Sensor 1 1C1...
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Page 119: ...MJB4 Electronics Schematics Rev 02 01 06 109 4 APPENDIX 191982 Cable W14 Sensor 1 3C1...
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Page 121: ...MJB4 Electronics Schematics Rev 02 01 06 111 4 APPENDIX 191983 Cable W15 Sensor 00C3...
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Page 123: ...MJB4 Electronics Schematics Rev 02 01 06 113 4 APPENDIX 191984 Cable W16 Sensor 00C1...
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Page 125: ...MJB4 Electronics Schematics Rev 02 01 06 115 4 APPENDIX 191985 Cable W17 Sensor 00C2...
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Page 127: ...MJB4 Electronics Schematics Rev 02 01 06 117 4 APPENDIX 191986 Cable W18 Sensor 9 C1...
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Page 129: ...MJB4 Electronics Schematics Rev 02 01 06 119 4 APPENDIX 189907 Cable W19 PLC SCU41 CIC1200...
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Page 131: ...MJB4 Electronics Schematics Rev 02 01 06 121 4 APPENDIX 189878 Cable W20 Elektronic ON key 2S2...
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Page 135: ...MJB4 Electronics Schematics Rev 02 01 06 125 4 APPENDIX 189906 Cable W22 Touchscreen Port A...
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Page 137: ...MJB4 Electronics Schematics Rev 02 01 06 127 4 APPENDIX 188501 Cable W23 Unit U2 Unit U1...
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Page 139: ...MJB4 Electronics Schematics Rev 02 01 06 129 4 APPENDIX 190053 Cable W24 Unit U3 Unit U1...
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Page 141: ...MJB4 Electronics Schematics Rev 02 01 06 131 4 APPENDIX 189826 Power supply...
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Page 143: ...MJB4 Electronics Schematics Rev 02 01 06 133 4 APPENDIX 190672 PLC...
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Page 145: ...MJB4 Electronics Schematics Rev 02 01 06 135 4 APPENDIX 190674 Sensors manipulator...
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Page 149: ...MJB4 Electronics Schematics Rev 02 01 06 139 4 APPENDIX 190673 Sensors lamp house...
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Page 157: ...MJB4 Electronics Schematics Rev 02 01 06 147 4 APPENDIX 189489 Layout distributorplate MJB4...
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Page 159: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 149 4 4 8 International Chemical Safety Cards Mercury...
Page 160: ...APPENDIX MJB4 150 MJB4 Appendix Rev02 01 06 4...
Page 161: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 151 4...
Page 162: ...APPENDIX MJB4 152 MJB4 Appendix Rev02 01 06 4 4 9 Lock Out Tag Out Checklist...
Page 163: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 153 4...