
SUSS MicroTec Worldwide
ASIA
SUSS MicroTec KK (Japan)
GITC 1-18-2, Hakusan, Midori-ku
Yokohama, Kanagawa, Japan 226-0006
Phone (+81)-45-931-5600
Fax (+81)-45-931-5601
SUSS MicroTec (Shanghai) Co.,Ltd.
580 Nanjing W.Rd
Nanzheng Building Room 606
200041 Shanghai PRC
Phone (+86) 21-52340432
Fax (+86) 21-52340430
SUSS MicroTec (Taiwan) Co., Ltd.
8F l11 l No. 81 l Shui-Lee Road
Hsin-Chu l 300 l Taiwan
Phone (+886)-(3)-5169098
Fax (+886)-(3)-5169262
SUSS MicroTec Co., LTD
(South and Northeast Asia)
3388/92-93 I 25th Floor l Sirinrat Building
Rama IV Road l Klongtoey
Bangkok 10110 l Thailand
Phone (+66)-(0)-2350 6038
Fax (+66)-(0)-2633 5728
EUROPE
SUSS MicroTec Ltd.
Hogwood Ind. Estate
23, Ivanhoe Road
Finchampstead, Wokingham
Berkshire RG40 4QQ l England
Phone (+44)-(0) 1189-732144
Fax (+44)-(0) 1189-734395
www.suss.com
SUSS MicroTec S.A.
Avenue des Colombières
F-74490 Saint Jeoire l France
Phone (+33)-(0) 4 50 35 83 92
Fax (+33)-(0) 4 50 35 88 01
SUSS MicroTec Test Systems GmbH
Süss-Strasse 1
D-01561 Sacka/Dresden l Germany
Phone (+49)-(0) 35240-73-0
Fax (+49)-(0) 35240-73-700
SUSS MicroTec Lithography GmbH
Schleissheimer Strasse 90
D-85748 Garching/München l Germany
Phone (+49)-(0) 89/3 20 07-0
Fax (+49)-(0) 89/3 20 07-162
NORTH AMERICA
SUSS MicroTec Inc.
Western Regional Sales Office
8240 So. Kyrene Road Suite 101
Tempe, AZ 85284-2117 l USA
Phone (+1) (480) 557-9370
Fax (+1) (480) 557-9371
SUSS MicroTec Inc.
228 Suss Drive
Waterbury Center, VT 05677 l USA
Phone (+1) (802) 244-5181
Fax (+1) (802) 244-5103
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Summary of Contents for MJB4
Page 1: ...MJB4 Manual High End Mask Aligner Rev 02 01 06 www suss com Mask Aligners USER MANUAL...
Page 2: ......
Page 6: ...CONTENTS IV MJB4 Contents Rev02 01 06 i...
Page 8: ...MJB4 Foreword Rev02 01 06 F b...
Page 10: ...MJB4 Attention Rev02 01 06 d...
Page 16: ...WARNINGS AND SAFETY PRECAUTIONS 6 MJB4 Warnings and Safety Rev02 01 06 1...
Page 24: ...INSTALLATION AND TRANSPORT 14 MJB4 Installation and Transport Rev02 01 06 2...
Page 48: ...OPERATION OF THE MJB4 38 MJB4 Operation Rev02 01 06 3...
Page 51: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 41 4...
Page 57: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 47 4...
Page 64: ...APPENDIX MJB4 54 Appendix MJB4 E Rev02 01 06 4...
Page 65: ...MJB4 Appendix Rev 02 01 06 55 APPENDIX 4 191930 Pneumatic Plan Sheet 1 of 4...
Page 66: ......
Page 67: ...MJB4 Appendix Rev 02 01 06 57 APPENDIX 4 191930 Pneumatic Plan Sheet 2 of 4...
Page 68: ......
Page 69: ...MJB4 Appendix Rev 02 01 06 59 APPENDIX 4 191930 Pneumatic Plan Sheet 3 of 4...
Page 70: ......
Page 71: ...MJB4 Appendix Rev 02 01 06 61 APPENDIX 4 191930 Pneumatic Plan Sheet 4 of 4...
Page 72: ......
Page 75: ...MJB4 Electronics Schematics Rev 02 01 06 65 4 APPENDIX Wire list Rev 06 Sheet 1 of 7...
Page 76: ......
Page 77: ...MJB4 Electronics Schematics Rev 02 01 06 67 4 APPENDIX Wire list Rev 06 Sheet 2 of 7...
Page 78: ......
Page 79: ...MJB4 Electronics Schematics Rev 02 01 06 69 4 APPENDIX Wire list Rev 06 Sheet 3 of 7...
Page 80: ......
Page 81: ...MJB4 Electronics Schematics Rev 02 01 06 71 4 APPENDIX Wire list Rev 06 Sheet 4 of 7...
Page 82: ......
Page 83: ...MJB4 Electronics Schematics Rev 02 01 06 73 4 APPENDIX Wire list Rev 06 Sheet 5 of 7...
Page 84: ......
Page 85: ...MJB4 Electronics Schematics Rev 02 01 06 75 4 APPENDIX Wire list Rev 06 Sheet 6 of 7...
Page 86: ......
Page 87: ...MJB4 Electronics Schematics Rev 02 01 06 77 4 APPENDIX Wire list Rev 06 Sheet 7 of 7...
Page 88: ......
Page 89: ...MJB4 Electronics Schematics Rev 02 01 06 79 4 APPENDIX Overview of cables...
Page 90: ......
Page 91: ...MJB4 Electronics Schematics Rev 02 01 06 81 4 APPENDIX 189872 Cable W1 Unit U1 SPS OD232...
Page 92: ......
Page 93: ...MJB4 Electronics Schematics Rev 02 01 06 83 4 APPENDIX 189873 Cable W2 Pneumatic I...
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Page 95: ...MJB4 Electronics Schematics Rev 02 01 06 85 4 APPENDIX 189874 Cable W3 Pneumatic II...
Page 96: ......
Page 97: ...MJB4 Electronics Schematics Rev 02 01 06 87 4 APPENDIX 189902 Cable W4 Unit U1 VCC PLC...
Page 98: ......
Page 99: ...MJB4 Electronics Schematics Rev 02 01 06 89 4 APPENDIX 189876 Cable W5 Unit U1 PLC ID211...
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Page 101: ...MJB4 Electronics Schematics Rev 02 01 06 91 4 APPENDIX 189877 Cable W6 Unit U1 PLC AD081...
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Page 105: ...MJB4 Electronics Schematics Rev 02 01 06 95 4 APPENDIX 189898 Cable W8 VCC Unit U1...
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Page 107: ...MJB4 Electronics Schematics Rev 02 01 06 97 4 APPENDIX 189875 Cable W9 Signals X2 U1...
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Page 109: ...MJB4 Electronics Schematics Rev 02 01 06 99 4 APPENDIX 189900 Cable W10 VCC Touchscreen...
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Page 117: ...MJB4 Electronics Schematics Rev 02 01 06 107 4 APPENDIX 191981 Cable W13 Sensor 1 1C1...
Page 118: ......
Page 119: ...MJB4 Electronics Schematics Rev 02 01 06 109 4 APPENDIX 191982 Cable W14 Sensor 1 3C1...
Page 120: ......
Page 121: ...MJB4 Electronics Schematics Rev 02 01 06 111 4 APPENDIX 191983 Cable W15 Sensor 00C3...
Page 122: ......
Page 123: ...MJB4 Electronics Schematics Rev 02 01 06 113 4 APPENDIX 191984 Cable W16 Sensor 00C1...
Page 124: ......
Page 125: ...MJB4 Electronics Schematics Rev 02 01 06 115 4 APPENDIX 191985 Cable W17 Sensor 00C2...
Page 126: ......
Page 127: ...MJB4 Electronics Schematics Rev 02 01 06 117 4 APPENDIX 191986 Cable W18 Sensor 9 C1...
Page 128: ......
Page 129: ...MJB4 Electronics Schematics Rev 02 01 06 119 4 APPENDIX 189907 Cable W19 PLC SCU41 CIC1200...
Page 130: ......
Page 131: ...MJB4 Electronics Schematics Rev 02 01 06 121 4 APPENDIX 189878 Cable W20 Elektronic ON key 2S2...
Page 132: ......
Page 134: ......
Page 135: ...MJB4 Electronics Schematics Rev 02 01 06 125 4 APPENDIX 189906 Cable W22 Touchscreen Port A...
Page 136: ......
Page 137: ...MJB4 Electronics Schematics Rev 02 01 06 127 4 APPENDIX 188501 Cable W23 Unit U2 Unit U1...
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Page 139: ...MJB4 Electronics Schematics Rev 02 01 06 129 4 APPENDIX 190053 Cable W24 Unit U3 Unit U1...
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Page 141: ...MJB4 Electronics Schematics Rev 02 01 06 131 4 APPENDIX 189826 Power supply...
Page 142: ......
Page 143: ...MJB4 Electronics Schematics Rev 02 01 06 133 4 APPENDIX 190672 PLC...
Page 144: ......
Page 145: ...MJB4 Electronics Schematics Rev 02 01 06 135 4 APPENDIX 190674 Sensors manipulator...
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Page 149: ...MJB4 Electronics Schematics Rev 02 01 06 139 4 APPENDIX 190673 Sensors lamp house...
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Page 157: ...MJB4 Electronics Schematics Rev 02 01 06 147 4 APPENDIX 189489 Layout distributorplate MJB4...
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Page 159: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 149 4 4 8 International Chemical Safety Cards Mercury...
Page 160: ...APPENDIX MJB4 150 MJB4 Appendix Rev02 01 06 4...
Page 161: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 151 4...
Page 162: ...APPENDIX MJB4 152 MJB4 Appendix Rev02 01 06 4 4 9 Lock Out Tag Out Checklist...
Page 163: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 153 4...