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SUSS MJB4 User Manual Download Page 164

SUSS MicroTec Worldwide

ASIA

SUSS MicroTec KK (Japan)

GITC 1-18-2, Hakusan, Midori-ku
Yokohama, Kanagawa, Japan 226-0006
Phone (+81)-45-931-5600
Fax (+81)-45-931-5601

SUSS MicroTec (Shanghai) Co.,Ltd.

580 Nanjing W.Rd
Nanzheng Building Room 606
200041 Shanghai PRC
Phone (+86) 21-52340432
Fax (+86) 21-52340430

SUSS MicroTec (Taiwan) Co., Ltd.

8F l11 l No. 81 l Shui-Lee Road
Hsin-Chu l 300 l Taiwan
Phone (+886)-(3)-5169098
Fax (+886)-(3)-5169262

SUSS MicroTec Co., LTD

(South and Northeast Asia)
3388/92-93 I 25th Floor l Sirinrat Building
Rama IV Road l Klongtoey
Bangkok 10110 l Thailand
Phone (+66)-(0)-2350 6038
Fax (+66)-(0)-2633 5728

EUROPE

SUSS MicroTec Ltd.

Hogwood Ind. Estate
23, Ivanhoe Road
Finchampstead, Wokingham
Berkshire RG40 4QQ l England
Phone (+44)-(0) 1189-732144
Fax (+44)-(0) 1189-734395

www.suss.com

SUSS MicroTec S.A.

Avenue des Colombières
F-74490 Saint Jeoire l France
Phone (+33)-(0) 4 50 35 83 92
Fax (+33)-(0) 4 50 35 88 01

SUSS MicroTec Test Systems GmbH

Süss-Strasse 1
D-01561 Sacka/Dresden l Germany
Phone (+49)-(0) 35240-73-0
Fax (+49)-(0) 35240-73-700

SUSS MicroTec Lithography GmbH

Schleissheimer Strasse 90
D-85748 Garching/München l Germany
Phone (+49)-(0) 89/3 20 07-0
Fax (+49)-(0) 89/3 20 07-162

NORTH AMERICA

SUSS MicroTec Inc.

Western Regional Sales Office
8240 So. Kyrene Road Suite 101
Tempe, AZ 85284-2117 l USA
Phone (+1) (480) 557-9370
Fax (+1) (480) 557-9371

SUSS MicroTec Inc.

228 Suss Drive
Waterbury Center, VT 05677 l USA
Phone (+1) (802) 244-5181
Fax (+1) (802) 244-5103

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Summary of Contents for MJB4

Page 1: ...MJB4 Manual High End Mask Aligner Rev 02 01 06 www suss com Mask Aligners USER MANUAL...

Page 2: ......

Page 3: ...hine for Working 5 1 6 3 Safety Checks 5 2 Installation and Transport 7 2 1 Prerequisites for Installation 7 2 1 1 Ambient Requirements 7 2 2 Transporting the Mask Aligner 10 2 2 1 Warranty and Restri...

Page 4: ...djusting the Substrate with the Upper Microscope 29 3 5 1 Setting the Exposure Values 29 3 5 2 Loading the Mask 29 3 5 3 Loading the Substrate 29 3 5 4 Adjusting the Microscope 29 3 5 5 Adjusting the...

Page 5: ...B4 Contents Rev02 01 06 III i 4 6 Schematics of the Pneumatic System MJB4 53 4 7 Schematics of the Electronic System MJB4 63 4 8 International Chemical Safety Cards Mercury 149 4 9 Lock Out Tag Out Ch...

Page 6: ...CONTENTS IV MJB4 Contents Rev02 01 06 i...

Page 7: ...us thicknesses The MJB4 Mask Aligner is a state of the art instrument The MJB4 combines proven and newly developed technology for adjusting wafers fragments of wafers and substrates Different versions...

Page 8: ...MJB4 Foreword Rev02 01 06 F b...

Page 9: ...MJB4 Attention Rev02 01 06 c Attention It is strongly recommended to read this user manual before starting the mask aligner the first time...

Page 10: ...MJB4 Attention Rev02 01 06 d...

Page 11: ...asures and recommended procedures are described in this section of the manual as well as in warnings which are applied to the machine or its assemblies or in some cases to the packaging Both types of...

Page 12: ...ection 1 5 2 Thermal Dangers The upper side of the lamp house gets very hot dur ing operation Operating temperatures of several hundred C occur on the lamp itself The lamp cooling must be correctly ad...

Page 13: ...oxygen An exposure lamp therefore generates ozone during operation Long term and intensive exposure to ozone can lead to damage to the respiratory organs Where powerful lamps or special lamps for dee...

Page 14: ...directions When fitting or removing the lamp avoid any me chanical load acting on the glass tube Only tighten the lamp by hand Pay attention to the correct handling of different lamp mountings depend...

Page 15: ...uld be observed It is possible to return the lamps to the supplier or manufacturer 1 6 2 Preparing the Machine for Working Check that the vibration insulated table if present is working Caution In the...

Page 16: ...WARNINGS AND SAFETY PRECAUTIONS 6 MJB4 Warnings and Safety Rev02 01 06 1...

Page 17: ...y 2 1 1 Ambient Requirements The machine must be installed on a vibration free surface since vibrations can negatively influence the machine s function We recommend setting up the machine on a SUSS Mi...

Page 18: ...100 240 F1 A CPC200 4 F2 A electronics 2 F3 A 7 5 Nitrogen ca 1 5bar 30 45 psi Consumption Depends on lamp model see the table Settings for lamp cooling and lamp housing extraction in section 1 1 Prer...

Page 19: ...r required item no 189336 HBO 350 W S PN 146 049 USH 350 DS PN 182 538 UXM 501 MD PN 148 979 additional lamp adapter required item no 182721 Connections at MJB4 rear 1 Compressed air 2 Nitrogen 3 Vacu...

Page 20: ...ded loads Check the number of shipping containers Observe the transport instructions on the shipping container Never tilt or hit shipping containers Check shipping packaging for traces of damage due t...

Page 21: ...fer to the shipping papers for the weight of the machine which varies according to the equipment Warning Also make sure the transport straps are made of an appropriate material to avoid damaging the m...

Page 22: ...x and 2 2x must be removed from the adjusting table Next open the clamping screws on the mask holding frame and carefully remove the safeguards Also remove screw 3 which secures the X Y adjustment Adj...

Page 23: ...must be taken to protect the Mask Aligner from damage before it can be transported The machine must be transported and installed by a SUSS MicroTec service technician or person authorized by SUSS Micr...

Page 24: ...INSTALLATION AND TRANSPORT 14 MJB4 Installation and Transport Rev02 01 06 2...

Page 25: ...400 nm exposure optics and lamps that allow a resolution of 1 m in vacuum contact Using 300 or 250 nm exposure optics or an Excimer laser results in a significantly lower resolution Modular construct...

Page 26: ...te System The unit for position specifications in the X and Y directions is millimeters The unit for position specification in the Z direction is micrometers The specifications refer to a coordinate s...

Page 27: ...ont side of the adjusting station It sets the contact position between the mask and substrate It must be reset for different mask and substrate thicknesses The thickness setting can also be used for h...

Page 28: ...the microscope on both sides Fine focusing takes place with very little torque up to one revolution Further rotation with increased torque activates coarse focusing TSA Lighting Aperture The aperture...

Page 29: ...GHT CAMERA right frame LEFT CAMERA left frame BOTH CAMERAS split field 3 2 5 Microscope Lighting TSA IR Lighting Switch The lighting for the TSA microscope or IR use can be switched using the INCIDENT...

Page 30: ...chuck 3 2 7 Buttons in the Display Touch Screen ENTER The Enter button confirms messages and actions when you are prompted by the program EXPOSURE Once the adjustment process is complete this button...

Page 31: ...monitored by detectors which display an error message in the display if there is a deviation of approx 20 Low Vacuum with controller This controller sets the low pressure in the vacuum chamber betwee...

Page 32: ...ress the right arrow button to return to the MAIN MENU If this button is pressed too early in the start menu the following message appears Machine initialization please wait The exposure lamp is switc...

Page 33: ...switch on the CIC1200 The label of the button changes to CIC ON Afterwards the exposure lamp must be switched on with the LAMP OFF button The label of the button changes to LAMP HEATING during the war...

Page 34: ...e pause time between the individual cycles can be changed Press PAUSE TIME on the display to do so Exposure Time Pressing this button opens the EXPOSURE TIME menu which allows you to enter the desired...

Page 35: ...er the PROGRAM MENU Press the LOAD button to activate the dis played parameters and the display switches back to the MAIN MENU WARNING If you press the DELETE button all the parameters are deleted wit...

Page 36: ...ible if the mask holder is not clamped in the ad justing station 3 3 6 Loading the Substrate Pulling out the transport slide and loading the substrate Pull out the transport slide as far as it will go...

Page 37: ...nd max 2 0 bar This can be done using the WEC PRESSURE setting knob The set value is indicated in the WEC SETTINGS menu 3 3 9 Wedge Error Compensation WEC The WEC is performed manually To perform WEC...

Page 38: ...slide and load the chuck Place the substrate on the chuck Completely insert the slide Raise the substrate with the contact lever Experienced operators can use the contact lever without first selecting...

Page 39: ...so will damage the mask and substrate Experienced operators can use the contact lever without first selecting the LOAD SUBSTRATE button 3 5 4 Adjusting the Microscope Setting the TSA Microscope The sp...

Page 40: ...or IR substrate adjustment special IR cameras p n 186259 and special IR lenses are required for the opaque area The following example explains the necessary steps for IR adjustment and exposure with m...

Page 41: ...e Setting the TSA microscope to the Mask Adjust ing Crosses The right left microscope is set to the right left mask adjusting crosses with OBJECTIVE X SEPARATION 3 6 1 5 Adjusting the Substrate Focusi...

Page 42: ...witch off the mask vacuum by pressing the MASKVACUUM IS ON button The mask can now be removed IR Lighting Setting The SETTINGS MENU must be selected in the display and the lighting must be set to INFR...

Page 43: ...res are selected and edited in the EXPOSURE VALUES menu Distance Exposure Wedge error compensation takes place in contact After the substrate is adjusted to the mask exposure is carried out at a speci...

Page 44: ...rding to the set exposure time regardless of whether or not the mask holder was loaded 3 7 2 Multiple Exposure For special applications or to determine exposure times the entire exposure time can be d...

Page 45: ...ion SOFT CONTACT HARD CONTACT Enter the HC time in the submenu and press ENTER to confirm LOW VACUUM CONTACT Enter the pre vacuum and full vac uum time in the submenu and press ENTER to confirm VACUUM...

Page 46: ...Menu in the Display Button Strokes in the Display MAIN MENU SETTINGS MENU SETTINGS MENU PROGRAM MENU CONTENT Select available program space PROGRAM MENU SAVE All parameters stored under the program n...

Page 47: ...he substrate with the contact lever WEC WARNING Microscope pivots downwards EXPOSE Separation lever set to adjusting position SUBSTRATE ADJUSTMENT Adjust substrate Separation lever set to adjusting po...

Page 48: ...OPERATION OF THE MJB4 38 MJB4 Operation Rev02 01 06 3...

Page 49: ...t Soft Hard Low Vac Vac Flood E Lamptest Exp Time Exposure time 5 0 sec 0 1 999 9 Wait Time Pause between exposure intervals multiple exposure 5 sec 2 0 999 9 Exp Cycles Number of cycles multiple expo...

Page 50: ...02 01 06 4 4 2 List of Abbreviations Theta rotation CIC Constant intensity controller CPC Constant power controller IR InfraRed N2 Nitrogen PLC Programmable Logic Controller TSA Top Side Alignment Vac...

Page 51: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 41 4...

Page 52: ...st Exposure 29 Flood exposure 35 H Hard contact exposure 34 I Installation 8 IR lighting 31 33 L Lamp cooling 5 Lamp housing 21 Lamp test 21 Low vacuum 22 Low vacuum contact exposure 35 M Main switch...

Page 53: ...VE CIRCUIT BREAKER PROPAK2A 250V PHB2 A8 SX 22 H A 2 2 158611 PROTECTIVE CIRCUIT BREAKER PROPAK 4A 250VAC 2POLAR PHB22 A8 SX 22 H A 4 2 148939 GLOW DISCHARGE LAMP 191434 Illuminationcontrollerunit 4 C...

Page 54: ...200 191356 PRESSURE SWITCH SDE5 D2 FP Q4E P M8 187248 FRONT PANEL RIGHT MJB4 188348 TOUCH SCREEN 188352 RELAYS 187871 TSA MANIPULATOR MJB4 188128 PNEUMATIC CYLINDER PD 25 ST 20 DA CUS POS 179774 SENS...

Page 55: ...173981 PLUG CONNECTION QSM M3 4 I 146585 MICROSWITCH WITH ROLL 146618 MICROSWITCH WITH ROLL 1A 250V 152100 O RING 3 X 1 185463 COMPRESSION SPRING 151082 HOSE NOZZLE M2 5 151094 SILICONE HOSE TRANSP 3M...

Page 56: ...VEL CONNECTION M5 FOR HOSE 4X1 150914 T SWIVEL CONNECTION M5 FOR HOSE 4X1 111440 LAMP HOUSE BASE ASSEMBLY LH350 150906 L CONNECTION 151174 FLOWMETER 151130 REDUCING NIPPLE R1 4 M5 150906 L CONNECTION...

Page 57: ...APPENDIX MJB4 Appendix MJB4 E Rev02 01 06 47 4...

Page 58: ...6 4 4 5 Service Information The first digit in the identifiers of valves chokes sen sors etc always refers to the component numbers listed above Component name Component no Pneumatic system 0 Adjustin...

Page 59: ...contact 1 1 Y12 R Vent return atmosphere vacuum contact R Unassigned 1 3Y2 P WEC brake closer Identifier Medium Function 9Y4 N2 Lamp cooling shutter and lamp socket top bottom 1 1Y1 V Chuck clamping o...

Page 60: ...ontrols speed of microscope motion up 8R1 2 Controls speed of microscope motion down 9R1 1 Controls speed of mirror house motion forward 9R1 2 Controls speed of mirror house motion backward 9R2 1 Cont...

Page 61: ...re Identifier Function 9F4 Lamp socket cooling Identifier Function PD1 Machine main air pressure PD2 Machine main nitrogen pressure PD3 Vacuum Identifier Function 1B1 Z axis up wedge error compensatio...

Page 62: ...d connector X6 PLC analog output AD081 X7 PLC module digital in ID211 X8 Interlock nitrogen CIC1200 X9 Buzzer X10 Splitter box for camera selection left right Identifier Function X11 Power supply 100...

Page 63: ...B4 MJB4 Appendix Rev02 01 06 53 4 4 6 Schematics of the Pneu matic System MJB4 Item Description Schematic Sheet No Page 1 Pneumatic plan 191930 1 of 4 55 2 191930 2 of 4 57 3 191930 3 of 4 59 4 191930...

Page 64: ...APPENDIX MJB4 54 Appendix MJB4 E Rev02 01 06 4...

Page 65: ...MJB4 Appendix Rev 02 01 06 55 APPENDIX 4 191930 Pneumatic Plan Sheet 1 of 4...

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Page 67: ...MJB4 Appendix Rev 02 01 06 57 APPENDIX 4 191930 Pneumatic Plan Sheet 2 of 4...

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Page 69: ...MJB4 Appendix Rev 02 01 06 59 APPENDIX 4 191930 Pneumatic Plan Sheet 3 of 4...

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Page 71: ...MJB4 Appendix Rev 02 01 06 61 APPENDIX 4 191930 Pneumatic Plan Sheet 4 of 4...

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Page 73: ...189877 91 15 Cable W7 Unit U1 Interlock N2 CIC1200 189505 189903 93 16 Cable W8 VCC Unit U1 189897 189898 95 17 Cable W9 Signals X2 U1 190336 189875 97 18 Cable W10 VCC Touchscreen 189899 189900 99 19...

Page 74: ...h nix SACB 6 3 L M16 U2 manipulator 190669 190670 137 37 Sensors lamp house 187260 190673 139 38 Ph nix SACB 6 3 L M16 U3 lamp house 190669 190671 141 39 Wiring diagram distributorplate MJB4 189489 14...

Page 75: ...MJB4 Electronics Schematics Rev 02 01 06 65 4 APPENDIX Wire list Rev 06 Sheet 1 of 7...

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Page 77: ...MJB4 Electronics Schematics Rev 02 01 06 67 4 APPENDIX Wire list Rev 06 Sheet 2 of 7...

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Page 79: ...MJB4 Electronics Schematics Rev 02 01 06 69 4 APPENDIX Wire list Rev 06 Sheet 3 of 7...

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Page 81: ...MJB4 Electronics Schematics Rev 02 01 06 71 4 APPENDIX Wire list Rev 06 Sheet 4 of 7...

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Page 83: ...MJB4 Electronics Schematics Rev 02 01 06 73 4 APPENDIX Wire list Rev 06 Sheet 5 of 7...

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Page 85: ...MJB4 Electronics Schematics Rev 02 01 06 75 4 APPENDIX Wire list Rev 06 Sheet 6 of 7...

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Page 87: ...MJB4 Electronics Schematics Rev 02 01 06 77 4 APPENDIX Wire list Rev 06 Sheet 7 of 7...

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Page 89: ...MJB4 Electronics Schematics Rev 02 01 06 79 4 APPENDIX Overview of cables...

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Page 91: ...MJB4 Electronics Schematics Rev 02 01 06 81 4 APPENDIX 189872 Cable W1 Unit U1 SPS OD232...

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Page 93: ...MJB4 Electronics Schematics Rev 02 01 06 83 4 APPENDIX 189873 Cable W2 Pneumatic I...

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Page 95: ...MJB4 Electronics Schematics Rev 02 01 06 85 4 APPENDIX 189874 Cable W3 Pneumatic II...

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Page 97: ...MJB4 Electronics Schematics Rev 02 01 06 87 4 APPENDIX 189902 Cable W4 Unit U1 VCC PLC...

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Page 99: ...MJB4 Electronics Schematics Rev 02 01 06 89 4 APPENDIX 189876 Cable W5 Unit U1 PLC ID211...

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Page 101: ...MJB4 Electronics Schematics Rev 02 01 06 91 4 APPENDIX 189877 Cable W6 Unit U1 PLC AD081...

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Page 103: ...MJB4 Electronics Schematics Rev 02 01 06 93 4 APPENDIX 189903 Cable W7 Unit U1 Interlock N2 CIC1200...

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Page 105: ...MJB4 Electronics Schematics Rev 02 01 06 95 4 APPENDIX 189898 Cable W8 VCC Unit U1...

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Page 107: ...MJB4 Electronics Schematics Rev 02 01 06 97 4 APPENDIX 189875 Cable W9 Signals X2 U1...

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Page 109: ...MJB4 Electronics Schematics Rev 02 01 06 99 4 APPENDIX 189900 Cable W10 VCC Touchscreen...

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Page 111: ...MJB4 Electronics Schematics Rev 02 01 06 101 4 APPENDIX 191494 Cable W11 Illumination Sheet 1 of 2...

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Page 113: ...MJB4 Electronics Schematics Rev 02 01 06 103 4 APPENDIX 191494 Cable W11 Illumination Sheet 2 of 2...

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Page 115: ...MJB4 Electronics Schematics Rev 02 01 06 105 4 APPENDIX 191513 Cable W12 Unit A4 Splitterbox U1...

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Page 117: ...MJB4 Electronics Schematics Rev 02 01 06 107 4 APPENDIX 191981 Cable W13 Sensor 1 1C1...

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Page 119: ...MJB4 Electronics Schematics Rev 02 01 06 109 4 APPENDIX 191982 Cable W14 Sensor 1 3C1...

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Page 121: ...MJB4 Electronics Schematics Rev 02 01 06 111 4 APPENDIX 191983 Cable W15 Sensor 00C3...

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Page 123: ...MJB4 Electronics Schematics Rev 02 01 06 113 4 APPENDIX 191984 Cable W16 Sensor 00C1...

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Page 125: ...MJB4 Electronics Schematics Rev 02 01 06 115 4 APPENDIX 191985 Cable W17 Sensor 00C2...

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Page 127: ...MJB4 Electronics Schematics Rev 02 01 06 117 4 APPENDIX 191986 Cable W18 Sensor 9 C1...

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Page 129: ...MJB4 Electronics Schematics Rev 02 01 06 119 4 APPENDIX 189907 Cable W19 PLC SCU41 CIC1200...

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Page 131: ...MJB4 Electronics Schematics Rev 02 01 06 121 4 APPENDIX 189878 Cable W20 Elektronic ON key 2S2...

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Page 133: ...MJB4 Electronics Schematics Rev 02 01 06 123 4 APPENDIX 189904 Cable W21 Touchscreen Port B PLC CJ1M...

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Page 135: ...MJB4 Electronics Schematics Rev 02 01 06 125 4 APPENDIX 189906 Cable W22 Touchscreen Port A...

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Page 137: ...MJB4 Electronics Schematics Rev 02 01 06 127 4 APPENDIX 188501 Cable W23 Unit U2 Unit U1...

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Page 139: ...MJB4 Electronics Schematics Rev 02 01 06 129 4 APPENDIX 190053 Cable W24 Unit U3 Unit U1...

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Page 141: ...MJB4 Electronics Schematics Rev 02 01 06 131 4 APPENDIX 189826 Power supply...

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Page 143: ...MJB4 Electronics Schematics Rev 02 01 06 133 4 APPENDIX 190672 PLC...

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Page 145: ...MJB4 Electronics Schematics Rev 02 01 06 135 4 APPENDIX 190674 Sensors manipulator...

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Page 147: ...MJB4 Electronics Schematics Rev 02 01 06 137 4 APPENDIX 190670 Ph nix SACB 6 3 L M16 U2 manipulator...

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Page 149: ...MJB4 Electronics Schematics Rev 02 01 06 139 4 APPENDIX 190673 Sensors lamp house...

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Page 151: ...MJB4 Electronics Schematics Rev 02 01 06 141 4 APPENDIX 190671 Ph nix SACB 6 3 L M16 U3 lamp house...

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Page 153: ...MJB4 Electronics Schematics Rev 02 01 06 143 4 APPENDIX 189489 Wiring diagram distributorplate MJB4...

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Page 155: ...MJB4 Electronics Schematics Rev 02 01 06 145 4 APPENDIX 189489 Components side printing distributorplate MJB4...

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Page 157: ...MJB4 Electronics Schematics Rev 02 01 06 147 4 APPENDIX 189489 Layout distributorplate MJB4...

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Page 159: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 149 4 4 8 International Chemical Safety Cards Mercury...

Page 160: ...APPENDIX MJB4 150 MJB4 Appendix Rev02 01 06 4...

Page 161: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 151 4...

Page 162: ...APPENDIX MJB4 152 MJB4 Appendix Rev02 01 06 4 4 9 Lock Out Tag Out Checklist...

Page 163: ...APPENDIX MJB4 MJB4 Appendix Rev 02 01 06 153 4...

Page 164: ...e Road Finchampstead Wokingham Berkshire RG40 4QQ l England Phone 44 0 1189 732144 Fax 44 0 1189 734395 www suss com SUSS MicroTec S A Avenue des Colombi res F 74490 Saint Jeoire l France Phone 33 0 4...

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