Description
11
GA01423_002_C0 - 10/2016 - © Leybold
1.3 Technical Data
Model
SC 5 D
SC 15 D
SC 30 D
SC 60 D
50 Hz 60 Hz
50 Hz 60 Hz
50 Hz 60 Hz
50 Hz 60 Hz
Displacement
l · min
-1
90 108
250 300
500 600
1000
1200
(swept volume)
m
3
· h
-1
5 6,48
15 18
30 36
60 72
cfm
3.1 3.8
8.8 10.6
17.6 21.2
35.3 42.3
Pumping speed
1
l · min
-1
80 93
210 230
420 500
880
1020
m
3
· h
-1
4,8 6,2
13,6 16,4
26,3 31,5
52 62
cfm
2.8 3.6
8
9.6
15.4 18.5
31.0 36.0
Ultimate pressure
Pa
≤ 5
≤ 1.6
≤ 1.0
≤ 1.0
mbar
≤ 0.05
≤ 0.016
≤ 0.01
≤ 0.01
Torr
≤ 0.037
≤ 0.012
≤ 0.0075
≤ 0.0075
Leak rate
3
mbar ·
l · s
-1
1.0 · 10
-6
1.0 · 10
-6
1.0 · 10
-6
1.0 · 10
-4
Max. inlet pressure
Atmospheric pressure
Ambient operating
°C
5 - 40
5 - 40
5 - 40
5 - 40
temperature range
Gas temperature at inlet
°C
max. 50
max. 50
max. 50
max. 50
Inlet connection
DN
25
25
40
40
Exhaust connection
DN
16
16
25
40
Cooling
Air cooling
Protection class
IP
20
20
20
20
Class of equipment
Class 1
Miscellaneous
With operating hours counter und
purge gas connection
Water vapour tolerance
g/day
5
25
25
25
at 25 °C, humidity 60 %,
with opened purge gas
4
l · min
-1
9
10
10
10
