Operation
33
GA01423_002_C0 - 10/2016 - © Leybold
Never change the purge gas conditions during operation (ON/OFF)
Open or close the purge gas valve port only after shutting down the pump.
Opening or closing the purge gas valve during operation can cause the
pump to fail and cause bodily injury.
To open the purge gas supply, shutdown the pump, remove the plug from
the purge gas port and screw the silencer into the purge gas port. (Fig. 4.4).
To close the purge gas valve, shutdown the pump. Remove the silencer from
the purge gas valve port and replace it with the plug. Lightly tighten the plug
with a wrench.
When supplying nitrogen gas or dry air to the purge gas valve port, set the
pressure equivalent to atmospheric pressure while keeping the flow below:
■
9 l · min
-1
for the SC 5 D or
■
10 l · min
-1
for the SC 15 D, SC 30 D and SC 60 D.
Exceeding a purge gas flow of 9 or 10 l/min cause pump failure.
NOTICE
SC 5 D
Fig. 4.4 Setting up the pump for purge gas operation
SC 15 D
Remove screw
Screw in
silencer
Remove screw
Screw in
silencer
Purge gas port
SC 30 D
Purge gas inlet
Remove screw
Screw in
silencer
SC 60 D
Remove
screw
Screw in
silencer
Purge gas inlet
Purge gas port
