Operation
31
GA01423_002_C0 - 10/2016 - © Leybold
Never remove or alter safety equipment or covers.
Removing or altering this equipment can cause electric shock or bodily
injury by rotating objects.
Operate at the pump only with the fan cover and the terminal cover in
place.
Operate in the single-phase pump only with the capacitor cover in place.
4.1 Start-up
Remove blank flanges from the inlet and outlet before starting the pump.
Operation with blank flanges can cause damage.
If you will be pumping humid air or condensable vapors, open the purge gas
valve (refer to Sec. 4.3) before starting the pump as described below.
The pump takes 6-8 hours to reach its ultimate pressure during its initial
start-up or after a long idle period.
Close the inlet isolation valve and continue operation for further 6-8 hours.
Open the purge gas valve for 3-5 seconds to atmosphere 2-3 times per hour.
While the pump was off, moisture may have entered the pump extending the
time needed to reach ultimate pressure.
Close the isolation valve between the vacuum pump and vacuum chamber
during start-up and shutdown of pump. Otherwise, debris from the pump
can be drawn back into the vacuum chamber.
When restarting a pump that is already at operating temperature, open the
purge gas valve for 3-5 seconds to atmosphere before restarting the pump.
Otherwise, the pump‘s temperature can become unbalanced causing it to
fail.
DANGER
NOTICE
Fig. 4.3 Never alter equipment
Fan cover
Capacitor cover
Terminal
cover
