Description
14
GA01423_002_C0 - 10/2016 - © Leybold
Fig. 1.4 Pumping speed curves of the SCROLLVAC SC 5 D to SC 60 D
0,10
1,00
10,00
100,00
0,001
0,010
0,100
1,000
10,000
100,000
1000,000
50 Hz with and without Purge
60 Hz with and without Purge
SC5D
SC15D
SC30D
SC60D
Pumping Speed
Pressure
m3/h
mbar