Installation
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GA01423_002_C0 - 10/2016 - © Leybold
3.6 Connection to the Vacuum System
Inlet of the SC 5 D is DN 25 and the exhaust is DN 16.
Inlet of the SC 15 D is DN 25 and the exhaust is DN 16.
Inlet of the SC 30 D is DN 40 and the exhaust is DN 25.
Inlet of the SC 60 D is DN 40 and the exhaust is DN 40.
Install an isolation valve between the vacuum chamber and the pump’s inlet
to prevent the drawback of debris from the vacuum pump into the vacuum
chamber during start-up or shutdown.
We recommend the use of an automatic valve as isolation valve which closes
during power failure to prevent the drawback of debris from inside the pump
into the vacuum chamber.
Install a purge gas valve between the isolation valve and the pump’s inlet.
Opening this purge gas valve during operation removes dirt and water vapour
from the pump.
Use the clean connecting tubing between vacuum chamber and vacuum
pump. We recommend the use of flexible tubing between the inlet of pump
and the vacuum chamber so that the pump’s vibration is not transmitted to
the vacuum chamber.
When connecting an exhaust line to the outlet of the vacuum pump, we
recommend the following maximum straight length:
SC 5 D: 30 m DN 16 line
SC 15 D: 5 m DN 16 line
SC 30 D: 15 m DN 25 line
SC 60 D: 40 m DN 40 line
Make sure that the exhaust line is not clogged during operation.
Ensure that the pressure at the pump’s exhaust is at atmospheric pressure.
Fig. 3.10 Block diagram of the connection to the vacuum system
Exhaust line
Vacuum chamber
Isolation valve
(automatic valve)
Additional purge
gas valve
Inlet
Outlet
Vacuum pump
