15
XL80 laser system
Linear measurement optics
The linear measurement optics are used for measuring linear
positional accuracy�
The linear displacement is measured by the difference between the stationary
beam splitter, retroreflector assembly and moving retroreflector. The targets
mount directly onto the optics to improve the alignment process�
1
2
3
Angular measurement optics
The angular measurement optics are used to measure angular displacements,
particularly angular pitch and yaw� The angular displacement is achieved by
measuring the difference between the angular interferometer and retroreflector.
1
Linear reflectors × 2
2
Beam splitter
3
Targets × 2
1
Angular reflector
2
Angular interferometer
3
Targets × 2
1
2
3
