Polytec TMS-350 TopMap In.Line, Hardware Manual

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6-4
6 Technical Specifications
6.3.2 Optics
Characteristics
Long-term Drift caused by Interferometer Warming up
Performance Characteristics
Model
Lateral measurement
range
Optical limit resolution
µm
TMS-350 L
Ø 21 mm (clip top and
bottom)
72
TMS-350 M
13.68 x 10.31 mm
2 40
TMS-350 S
6.43 x 4.84 mm
2 17.9
After switching on
h
Long-term drift
1
mm / min
1
typical values, depending on the interferometer and sample holder
0.25 140
0.5 75
1 50
2 20
3 15
3.5 10
Sampling increment
Nominal
1
(18 µm/s) Quick sampling
2
(67.4 µm/s)
Evaluation procedure
Smooth
surfaces
3
Rough
surfaces
4
Smooth
surfaces
3
Rough
surfaces
4
Specifications for the z performance
5
Measurement noise < 0.5 nm < 12 nm < 0.7 nm < 17 nm
Vertical resolution (measurement
noise *
)
1.4
nm 33.9 nm 2.0 nm 48.1 nm
Typical flatness measurement
6
Average flatness deviation < 14 nm < 125 nm < 15 nm < 210 nm
Measurement error flatness
measurement
< 25 nm < 210 nm < 25 nm < 350 nm
Repeatability < 1 nm < 35 nm < 2 nm < 50 nm
Reproducibility < 1.3 nm < 60 nm < 5 nm < 75 nm
1
Three samples per period of the correlogram
2
Undersampling the correlogram taking the Aliasing effect into consideration so that the interference maximum can be clearly
determined again.
3
Evaluation of correlogram phase
4
Evaluation of correlogram envelope
5
Empirically determined typical specification parameters for z-performance of the TMS-350 when making a measurement on a
plane glass plate (95 % of maximum AOI, interference contrast ≈ 0.7)
6
Rounded values of the deviation of the measured flatness for various TMS-350 devices for both evaluation methods
determined from the empirical measurement data and a statistical evaluation; measurement on a plane glass plate (95 % of
maximum AOI, interference contrast ≈ 0.7)