PI L-402 Series, User Manual, Page: 31 / 43

10 Technical Data
L-402 Mniature Stage MP164E Version: 1.2.0 27
10.1 Specifications
10.1.1 Data Table
L-402.10DD L-402.10SD Unit Tolerance
Motion and positioning
Travel range 13 13 mm
Integrated sensor
Rotary encoder with
A/B quadrature signal
transmission
–
Design resolution 0.122 2.5 (full step) µm
Sensor resolution rotary encoder 4096 – Cts./rev.
Minimum incremental motion 1 0.5 µm Typ.
Unidirectional repeatability 1 0.5 µm Typ.
Bidirectional repeatability ±5 ±5 µm Typ.
Pitch ±175 ±175 µrad Typ.
Yaw ±125 ±125 µrad Typ.
Straightness ±3 ±3 µm Typ.
Flatness ±3 ±3 µm Typ.
Velocity 5 5 mm/s Max.
Reference and limit switches
Forked photoelectric
sensor, N/C contact,
5V, NPN
Forked photoelectric
sensor, N/C contact,
5V, NPN
Mechanical properties
Drive screw Leadscrew Leadscrew
Drive screw pitch 0.5 0.5 mm
Load capacity 10 10 N Max.
Push/pull force 10 10 N Max.
Self-locking 10 10 N Max.
Permissible lateral force 5 5 N Max.
Permissible torque in θX, θY, θZ 1 1 N·m Max.
10 Technical Data