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2.1. Main Features

Turbopumps TPH/TPU 1201 P/P C with the TC 750 form a
complete unit. Voltage is supplied by power supply (see
Section 11. Accessories).

On delivery, the pumps have been set up for

operations in remote mode. Remote plug 8d
should therefore be disconnected from the 
TC 750 if operations with the DCU 001/DCU 600
or HPU 001 are required.

CAUTION

Cooling

Standard:

Water cooling 

Integrated protective measures against excess temperatures:

The Electronic Drive Unit TC 750 reduces 
the rotor rotation speed.

Bearings

High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Oil circulatory lubricated ball bearing 

with ceramic balls.

2. Understanding The Pumps 

The turbopumps must n

no

ott be transported when

filled with lubricant.
When being fitted into or dismantled from a
system, turbopumps may only be positioned as
shown in Section 3.2. Other positions can cause
the pumps to be contaminated with lubricant.

Ambient conditions

The turbomolecular pump needs to be installed in compliance
with the following ambient conditions:

Installation location:

protected against the weather
(rooms within buildings)

Temperature:

+5 °C to +40 °C

Relative humidity 
of the air: 

max. 80 % at T 

31 °C

up to max. 50% at T 

40 °C

Air pressure:

77 kPa - 106 kPa

Installation altitude: 

2000 m max.

Pollution degree:

2

Overvoltage category: 

II

Connection voltage: 

140 VDC ±5%

Proper Use

– The Turbomolecular Pumps may only be used for the

purpose of generating vacuum.

– The Turbomolecular Pumps TPH/TPU 1201 P C (please see

the type plate) are designed to pump corrosive gases and
vapours. Where corrosive gas processes are involved, gas
bonding and particles which can damage the surfaces of
the pump can be produced. The motor and bearing
compartments have to be protected with sealing gas.

– The turbopumps may only be used to pump those media

against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.

– If the process produces dust, the maintenance intervals

must be specified accordingly and sealing gas must be
used.

– If the pump is to be operated with more than 50% of the

permissible gas load then sealing gas should be used to
ensure rotor cooling.

– The turbopump must be connected to a backing pump in

accordance with Section 3.3..

– Only Pfeiffer Vacuum power supplies may be used to

operate the TC 750. The use of other power supplies requi-
res the prior agreement of the manufacturer and equalisa-
tion with the valid specification.

– Without the cover plate for the TC 750 the pumps may only

be operated providing the ambient conditions in complian-
ce with Protection Type IP 30 are observed.

CAUTION

Turbomolecular Pump TPH 1201 P / P C

1

High vacuum flange

2

Fore-vacuum flange

4

Venting screw

8

Electronic Drive Unit TC 750

8d Remote plug
9

Locking screw sealing gas connection

9

8

2

4

8d

1

F

Summary of Contents for TPH 1201 P

Page 1: ...Turbomolecular Pump With Electronic Drive Unit TC 750 PT 0147 BE G 0703 TPH 1201 P PC TPU 1201 P PC Betriebsanleitung Operating Instructions...

Page 2: ...erations 18 Operation with cooling water temperature 25 C 19 4 5 Circulatory Lubrication 20 4 6 Switching OFF And Venting 20 4 7 Shutting Down For Longer Periods 20 4 8 Operations With The DCU 001 DCU...

Page 3: ...the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 750 only in conjunction with the relevant power supply accessory Without th...

Page 4: ...y II Connection voltage 140 VDC 5 Proper Use The Turbomolecular Pumps may only be used for the purpose of generating vacuum The Turbomolecular Pumps TPH TPU 1201 P C please see the type plate are desi...

Page 5: ...been agreed by the manufacturer The connection to power supplies with earthing of a direct voltage pole The turbomolecular pumps and flange connections must not be used to tread on when climbing onto...

Page 6: ...ccidental contact Floor mounting of the turbomolecular pump is admissible after consulting the manufacturer The person responsible for commissioning must ensure that the installation is carried out in...

Page 7: ...he component parts in your set of mounting material Use 1 18 8 bracket screws Tighten the clamps crosswise in three steps Tightening torque 5 Nm 15 Nm 25 2 Nm See that the sealing surface is not damag...

Page 8: ...your set of mounting material Use 1 12 2 screws and 2 24 4 nuts For a flange material having a strength of 170 N mm2 and a stud screw with clearance hole the nuts must be tightened crosswise in three...

Page 9: ...Pfeiffer Vacuum range Connecting the backing pump All connections of the fore vacuum line With the usual small flange components or screwed hoses Be sure to conduct away the exhaust gases from the bac...

Page 10: ...nnection to a torque of 10 Nm Tighten all hose clips and check for firm seating of the hoses Cooling with the Recycled Water Cooling Unit TZK Accessory Connection Dirt traps are not permissible in the...

Page 11: ...TC 750 should be disconnected and then proceed in accordance with the relevant Operating Instructions 1 only with cable PM 051 843 T please see Section 11 CAUTION PLEASENOTE 3 7 Installing The Power S...

Page 12: ...serts with screwed cable glands and the cover 107d and insert the cables at the TC 750 In case the pump is operated using the remote control the remote control unit must be connected in accordance wit...

Page 13: ...agonal SW 14 Electrical connection Plug control lead 42a into the connection VENT of the TC 750 8 on the turbopump Release for venting is executed via remote plug pin 2 pre set on delivery please see...

Page 14: ...be processed 6 standby off standby on pump is accelerated to 66 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin o...

Page 15: ...the TC 750 is 960 Only safety low voltages SELV may be connected to Serial Interface RS 485 All switched on remote functions have priority over the serial interface functions Please refer to the separ...

Page 16: ...Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas Standby PWM on touch relation 25 7...

Page 17: ...lay And Operating Unit DCU HPU Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump T...

Page 18: ...a the DCU or HPU please refer to the respective operating Instructions Pumping gases with molecular mass 40 with the incorrect gas mode can cause damage to the pump When pumping noble gases heavier th...

Page 19: ...to high for the current power the rotor can overheat and being damaged that way A cooling water temperature 25 C has no influen ce the pump acts as with a cooling water temperature of 25 C To reduce p...

Page 20: ...ble First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s mu...

Page 21: ...ed setting operations for the turbopump Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs S S...

Page 22: ...ts in the turbomolecular pump being switched off LED on the TC 750 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d glows Power supply OK Function pumping station O...

Page 23: ...CU HPU or PC Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Page 24: ...FR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have t...

Page 25: ...tle the turbopump to change the lubricant this may only be carried out in the position shown in Section 3 2 otherwise the lubricant could contaminate the turbopump It is possible to detach the lubrica...

Page 26: ...Section 11 1 Install the lubricant pump back onto the turbomolecular pump again 8 4 Replacing The Electronic Drive Unit TC 750 Turbopump and Electronic Drive Unit TC 750 must only be disconnected fro...

Page 27: ...ow rate for Nitrogen N2 l s 1250 1250 1170 1170 Helium He l s 1300 1300 1230 1230 Hydrogen H2 l s 1100 1100 1050 1050 Argon Ar l s 1200 1200 1100 1100 CF4 l s 950 950 890 890 Compression ratio N2 1 10...

Page 28: ...sions Diagram 240 200 142 9 40 70 314 242 5 191 123 122 334 5 25 M16x32 tief 4 0 3 0 1 2 0 96 4 5 73 264 69 95 140 4 161 128 17 30 30 30 99 170 0 1 M6 DN 200 ISO K DN 40 ISO KF M6 G1 8 TPH 1201 P P C...

Page 29: ...29 200 142 9 40 70 122 25 M16x32 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 128 17 30 30 30 99 264 341 5 130 197 91 249 5 321 170 0 1 285 M6 DN 40 ISO KF DN 200 ISO F M6 G1 8 TPH 1201 P P C DN 200 ISO F...

Page 30: ...30 200 142 9 40 70 122 25 M16x32tief 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 99 253 264 142 210 262 333 354 128 30 30 30 17 170 0 1 M6 DN 200 CF F DN 40 ISO KF M6 G1 8 TPU 1201 P P C DN 200 CF F...

Page 31: ...rive Unit TC 750 1 PM C01 713 8d Remote plug 1 P 0920 668 E 17 Seal ring for water connections 2 P 3529 133 A 71 Lubricant filler screw 1 N 3191 382 X see Section 4 72 Lubricant drain screw 1 N 3191 3...

Page 32: ...321 Other accessories Connecting cable TC 750 TPS DCU PM 051 103 T 3 m other lengths on request Connecting cable TC 750 TPS DCU shielded PM 051 143 GT 3 m other lengths on request Power Supply TPS 60...

Page 33: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 34: ...specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provisio...

Page 35: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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